Author Affiliations
1Optoelectronics Research Centre, University of Southampton, Southampton, SO17 1BJ, UK2Electrical, Computer and Biomedical Engineering Department, University of Pavia, 27100 Pavia, Italy3Advanced Fiber Resources Milan S.r.l., 20098 San Donato Milanese, Italy4Currently at Instituto de Microelectrónica de Barcelona, IMB-CNM (CSIC), Campus UAB, 08193 Bellaterra, Spainshow less
Fig. 1. (a) 2D schematic view and simulation layout of the proposed dual-level Si GC; (b) cross-sectional schematic with the parameter names used to indicate the GC dimensions.
Fig. 2. (a) 2D numerical simulations of the CE at 1550 nm as a function of the bottom linear apodization factor Rbot and the etching depth e considering a single-level GC with a waveguide thickness hbot=220 nm. Other parameters used in the simulations are B=2 μm, Fin,bot=0.9, θ=14.5°, and T=720 nm. (b) 3D numerical simulations of the CE as a function of wavelength for the best-performing single-level and dual-level GC considering hbot=220 nm.
Fig. 3. 2D numerical simulations of (a) directionality and (b) CE at 1550 nm as a function of the top linear apodization factor Rtop and thickness of the top level htop for a dual-level GC with hbot=220 nm. Other parameters used in the simulations are e=110 nm, Rbot=0.0275 μm−1, B=2 μm, Fin,bot=0.9, Fin,top=0.1, θ=14.5°, and T=720 nm.
Fig. 4. Fabrication process diagram for the dual-level GC: (a) starting from SOI wafer with a Si thickness of 340 nm; (b) bottom GC level etching; (c) top GC level etching; (d) waveguide etching; (e) SiO2 cladding deposition. (f) Top-view and (g) angled-view SEM images of a fabricated device.
Fig. 5. Simulated (red curve) and experimentally measured (blue curve) CE as a function of wavelength for the fabricated dual-level GC with a bottom waveguide thickness hbot=220 nm and top-level thickness htop=120 nm.
Fig. 6. (a) Peak CE (CEpeak, left y axis) and peak wavelength (λpeak, right y axis) as a function of the mask misalignment; variation of the dimensions of the first top tooth and first bottom trench in the cases of (b) aligned masks, (c) −30 nm mask misalignment, and (d) +30 nm mask misalignment.
Si [nm] | Description | [dB] | [dB] | Ref. | Si [nm] | Description | [dB] | [dB] | Ref. |
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220 | GA* | −2.15 | – | [15] | 220 | GA* | −1.9 | – | [16] | 220 | GA + DBR* | −0.36 | – | [15] | 220b | Dual-level | −0.28 | −0.8 | This work | 220 | Poly-Si overlay | −1.08 | – | [17] | 250 | Full-etch PhC | −1.8 | −1.74 | [18] | 220 | Poly-Si overlay* | – | −1.6 | [19] | 250 | Lag effect etch* | −1.31 | −1.9 | [20] | 220 | Linear apodiz. | −2.6 | −2.7 | [21] | 250 | Linear apodiz. | −2.2 | −2.7 | [22] | 220 | Gold BR | −1.43 | −1.61 | [23] | 250 | Aluminum BR* | −0.33 | −0.5 | [24] | 220 | DBR* | −0.86 | −1.58 | [25] | 250 | Aluminum BR* | −0.33 | −0.62 | [26] | 220 | Linear apodiz. | −1.6 | – | [27] | 250 | Aluminum BR | −0.43 | −0.58 | [28] | 220 | DBR* | −1.02 | – | [29] | 260 | Linear apodiz. | −0.8 | −0.9 | [27] | 220 | Si overlay* | −1.8 | −2.6 | [30] | 260 | GA* | −1.0 | – | [16] | 220 | Ge overlay | −1.19 | – | [31] | 300 | Dual-etch | −0.25 | – | [32] | 220 | Dual-etch | −1.24 | −2.2 | [33] | 300 | Dual-etch | −2.2 | −2.7 | [34] | 220 | Dual-etch | −1.05 | – | [35] | 340 | GA* | −0.5 | – | [16] | 220 | Dual-etch | −1.1 | −1.3 | [36] | 340 | Apodized GC | −0.76 | −1.2 | [37] | 220 | Aluminum BR | −0.67 | −0.69 | [38] | 340 | Apodized GC | – | −1 | [39] | 220 | SWG+prism | −0.5 | −1.0 | [40] | 340 | Apodized GC* | – | −0.7 | [39] |
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Table 1. Summary of the Best Numerically Simulated (CES) and Experimentally Measured (CEE) Coupling Efficiencies Reported in the Literature for Different GCs in the C-Telecom Banda
No. | [nm] | [nm] | [nm] | No. | [nm] | [nm] | [nm] |
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1 | 610 | 549 | 61 | 13 | 643 | 434 | 161 | 2 | 613 | 540 | 69 | 14 | 646 | 424 | 170 | 3 | 616 | 532 | 77 | 15 | 649 | 413 | 179 | 4 | 618 | 522 | 85 | 16 | 652 | 402 | 188 | 5 | 621 | 513 | 93 | 17 | 656 | 392 | 198 | 6 | 623 | 503 | 101 | 18 | 659 | 381 | 208 | 7 | 626 | 494 | 109 | 19 | 662 | 369 | 217 | 8 | 629 | 484 | 117 | 20 | 665 | 358 | 227 | 9 | 632 | 475 | 126 | 21 | 669 | 347 | 237 | 10 | 635 | 465 | 134 | 22 | 672 | 335 | 247 | 11 | 637 | 454 | 143 | 23 | 675 | 323 | 257 | 12 | 640 | 444 | 152 | 24 | 679 | 311 | 268 |
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Table 2. Optimal Dimensions (Common Period Λ, Bottom Tooth Width Lo,bot, and Top Tooth Width Lo,top) Obtained from the Optimization of the Apodized Dual-Level Si GC with Waveguide Thickness hbot = 220 nm and Top Level Thickness htop = 120 nma