Chang'an Li, Mingdong Yang, Benqing Quan, Weilin Guan. Stress Simulation Analysis of Multilayer Film Deposition[J]. Laser & Optoelectronics Progress, 2018, 55(4): 043101
- Laser & Optoelectronics Progress
- Vol. 55, Issue 4, 043101 (2018)
Fig. 1. Edge misfit dislocation produced by lattice mismatch
Fig. 2. Deformation of wafer
Fig. 3. Flow chart of stress analysis of multilayer films
Fig. 4. Structure of multilayer films
Fig. 5. Stress distribution of multilayer films at each deposition stage. (a) Oxidized SiO2 films; (b) BPSG deposition film; (c) titanium deposition film; (d) SiNx deposition film
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Table 1. Material parameters of Si
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Table 2. Material parameters of SiO2
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Table 3. Material parameters of titanium, SiNx, and BPSG
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