PIC-integrable, uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor

Yiding Lin; Danhao Ma; Kwang Hong Lee; Rui-Tao Wen; Govindo Syaranamual; Lionel C. Kimerling; Chuan Seng Tan; Jurgen Michel

doi:10.1364/PRJ.419776

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