• Photonics Research
  • Vol. 9, Issue 7, 1255 (2021)
Yiding Lin1、2、5, Danhao Ma3, Kwang Hong Lee2, Rui-Tao Wen4、6, Govindo Syaranamual2, Lionel C. Kimerling3, Chuan Seng Tan1、2、*, and Jurgen Michel2、3、4、7
Author Affiliations
  • 1School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
  • 2Low Energy Electronic Systems (LEES), Singapore-MIT Alliance for Research and Technology, Singapore 138602, Singapore
  • 3Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
  • 4Materials Research Laboratories, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
  • 5Current address: Max Planck Institute of Microstructure Physics, Halle (Saale) 06120, Germany
  • 6Current address: Southern University of Science and Technology, Shenzhen 518055, China
  • 7e-mail: jmichel@mit.edu
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    DOI: 10.1364/PRJ.419776 Cite this Article Set citation alerts
    Yiding Lin, Danhao Ma, Kwang Hong Lee, Rui-Tao Wen, Govindo Syaranamual, Lionel C. Kimerling, Chuan Seng Tan, Jurgen Michel. PIC-integrable, uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor[J]. Photonics Research, 2021, 9(7): 1255 Copy Citation Text show less

    Abstract

    Mechanical strain engineering has been promising for many integrated photonic applications. However, for the engineering of a material electronic bandgap, a trade-off exists between the strain uniformity and the integration compatibility with photonic-integrated circuits (PICs). Herein, we adopted a straightforward recess-type design of a silicon nitride (SiNx) stressor to achieve a uniform strain with enhanced magnitude in the material of interest on PICs. Normal-incidence, uniformly 0.56% tensile strained germanium (Ge)-on-insulator (GOI) metal-semiconductor-metal photodiodes were demonstrated, using the recessed stressor with 750 MPa tensile stress. The device exhibits a responsivity of 1.84±0.15 A/W at 1550 nm. The extracted Ge absorption coefficient is enhanced by 3.2× to 8340 cm-1 at 1612 nm and is superior to that of In0.53Ga0.47As up to 1630 nm limited by the measurement spectrum. Compared with the nonrecess strained device, additional absorption coefficient improvement of 10%–20% in the C-band and 40%–60% in the L-band was observed. This work facilitates the recess-strained GOI photodiodes for free-space PIC applications and paves the way for various (e.g., Ge, GeSn or III-V based) uniformly strained photonic devices on PICs.
    (hv)|=A(hvEgΓ-LH+hvEgΓ-HH)/hv,

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    εxx=σxxv·(σyy+σzz)E,(A1)

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    εyy=σyyv·(σxx+σzz)E,(A2)

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    εzz=σzzv·(σxx+σyy)E,(A3)

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    δEhy=a(εxx+εyy+εzz),(A4)

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    δEsh=2b(εxxεzz),(A5)

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    EgLH=EgδEhy14δEsh+12Δ12Δ2+Δ·δEsh+94δEsh2,(A6)

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    EgHH=EgδEhy+12δEsh,(A7)

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    Yiding Lin, Danhao Ma, Kwang Hong Lee, Rui-Tao Wen, Govindo Syaranamual, Lionel C. Kimerling, Chuan Seng Tan, Jurgen Michel. PIC-integrable, uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor[J]. Photonics Research, 2021, 9(7): 1255
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