Yang Jishuo, Wang Xiangzhao, Li Sikun, Yan Guanyong. In Situ Aberration Measurement Method Based on a Phase-Shift Rings Target[J]. Acta Optica Sinica, 2014, 34(2): 211004
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Yang Jishuo, Wang Xiangzhao, Li Sikun, Yan Guanyong. In Situ Aberration Measurement Method Based on a Phase-Shift Rings Target[J]. Acta Optica Sinica, 2014, 34(2): 211004