• Acta Optica Sinica
  • Vol. 34, Issue 2, 211004 (2014)
Yang Jishuo1、2、*, Wang Xiangzhao1、2, Li Sikun1, and Yan Guanyong1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201434.0211004 Cite this Article Set citation alerts
    Yang Jishuo, Wang Xiangzhao, Li Sikun, Yan Guanyong. In Situ Aberration Measurement Method Based on a Phase-Shift Rings Target[J]. Acta Optica Sinica, 2014, 34(2): 211004 Copy Citation Text show less

    Abstract

    An in situ aberration measurement method based on a two-dimensional (2D) phase-shift rings target is proposed for quality evaluation of the lithographic projection lenses. A linear model between aerial-image intensity distribution and wavefront aberrations is built by principal component analysis (PCA) and multivariate linear regression analyses. Compared with the binary target in the AMAI-PCA method, the aerial images of the phase-shift rings contain more information which owns the ability of eliminating crosstalk between different kinds of aberrations, therefore, the accuracies of aberration measurement are improved. Impacts of aerial-image defocus error on the extractions of aberrations are analyzed. A measurement method for defocus error is also proposed. Simulations with the lithographic simulator Dr.LiTHO show that the proposed method can detect 12 terms of Zernike coefficients (Z5~Z16) with maximum error of 1×10-3λ. Simultaneously, the speed of aberration measurement is doubled because less aerial images need to be captured for the merit of applying the new 2D target.
    Yang Jishuo, Wang Xiangzhao, Li Sikun, Yan Guanyong. In Situ Aberration Measurement Method Based on a Phase-Shift Rings Target[J]. Acta Optica Sinica, 2014, 34(2): 211004
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