Le Kang, Shilei Jiang, Guobin Sun, Yuhao Zhang, Weiguo Liu. Simulation Study on Ion Beam Polishing with Changing Aperture by Diaphragm Method[J]. Laser & Optoelectronics Progress, 2021, 58(8): 0810016
- Laser & Optoelectronics Progress
- Vol. 58, Issue 8, 0810016 (2021)
Fig. 1. Diaphragms of different apertures. (a) 16 mm;(b) 12 mm;(c) 8 mm;(d) 5 mm
Fig. 2. Ion beam removal function model of diaphragm in different apertures. (a) 5 mm; (b) 8 mm; (c) 12 mm; (d) 16 mm
Fig. 3. Simulation results of ion beam one-dimensional superposition with 16 mm diaphragm. (a) Superimposed effect; (b) volatility
Fig. 4. Initial profile of fused quartz sample with diameter of 120 mm
Fig. 5. Ion beam simulation of residual variation curves with 16 mm aperture
Fig. 6. Optimal surface shapes of 16 mm aperture with different number of optimizations. (a) Preliminary simulation; (b) 1st optimization; (c) 2nd optimization; (d) 3rd optimization
Fig. 7. Root mean square values of diaphragm at different apertures. (a) 12 mm; (b) 8 mm; (c) 5 mm
Fig. 8. Ion beam simulation surface residual of diaphragm at different apertures. (a) 16 mm; (b) 12 mm; (c) 8 mm; (d) 5 mm
Fig. 9. Residence time distribution
Fig. 10. Surface shape after processing
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Table 1. Removal characteristic parameters of diaphragm in different apertures
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Table 2. Modified optimization results
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Table 3. Simulation results of ion beam polishing of diaphragm at different apertures
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