Simulation Study on Ion Beam Polishing with Changing Aperture by Diaphragm Method

Le Kang; Shilei Jiang; Guobin Sun; Yuhao Zhang; Weiguo Liu

doi:10.3788/LOP202158.0810016

Journals >Laser & Optoelectronics Progress >Volume 58 >Issue 8 >Page 0810016 > Article

Laser & Optoelectronics Progress
Vol. 58, Issue 8, 0810016 (2021)

Simulation Study on Ion Beam Polishing with Changing Aperture by Diaphragm Method

Le Kang, Shilei Jiang^*, Guobin Sun, Yuhao Zhang, and Weiguo Liu

Author Affiliations

School of Optoelectronic Engineering, Xi'an Technological University, Xi'an, Shaanxi 710021, China

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DOI: 10.3788/LOP202158.0810016 Cite this Article Set citation alerts

Le Kang, Shilei Jiang, Guobin Sun, Yuhao Zhang, Weiguo Liu. Simulation Study on Ion Beam Polishing with Changing Aperture by Diaphragm Method[J]. Laser & Optoelectronics Progress, 2021, 58(8): 0810016 Copy Citation Text

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