• Journal of Semiconductors
  • Vol. 43, Issue 10, 101301 (2022)
Yan Wang1, Tongtong Liu1, Jiangyi Liu1, Chuanbo Li1, Zhuo Chen2、*, and Shuhui Bo1、**
Author Affiliations
  • 1Optoelectronics Research Centre, School of Science, Minzu University of China, Beijing 100081, China
  • 2Key Laboratory of Bio-inspired Materials and Interfacial Science, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
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    DOI: 10.1088/1674-4926/43/10/101301 Cite this Article
    Yan Wang, Tongtong Liu, Jiangyi Liu, Chuanbo Li, Zhuo Chen, Shuhui Bo. Organic electro-optic polymer materials and organic-based hybrid electro-optic modulators[J]. Journal of Semiconductors, 2022, 43(10): 101301 Copy Citation Text show less
    EO chromophores with stronger electron-donors.
    Fig. 1. EO chromophores with stronger electron-donors.
    High performance chromophores for neat film poling.
    Fig. 2. High performance chromophores for neat film poling.
    (Color online) (a) Chemical structure for chromophores HLD1, HLD2, cross-linker C1, and polymer P1. (b) Temporal stability of the poled films HLD1/HLD2, HLD2/C1, HLD2/P1, JRD1/APC, and JRD1/PMMA at the curing temperature of 85 °C. Reproduced with permission from Ref. [27]. Copyright 2020, American Chemical Society.
    Fig. 3. (Color online) (a) Chemical structure for chromophores HLD1, HLD2, cross-linker C1, and polymer P1. (b) Temporal stability of the poled films HLD1/HLD2, HLD2/C1, HLD2/P1, JRD1/APC, and JRD1/PMMA at the curing temperature of 85 °C. Reproduced with permission from Ref. [27]. Copyright 2020, American Chemical Society.
    (Color online) (a) Schematic of the slot-photonic crystal slow-light phase modulator and dominant electric field component Ex at quasi-TE mode. Reprinted with permission from Ref. [70], Copyright 2008, The Optical Society. (b) Scanning electron microscopy (SEM) images of the fabricated device. Reprinted with permission from Ref. [73], Copyright 2016, The Optical Society.
    Fig. 4. (Color online) (a) Schematic of the slot-photonic crystal slow-light phase modulator and dominant electric field component Ex at quasi-TE mode. Reprinted with permission from Ref. [70], Copyright 2008, The Optical Society. (b) Scanning electron microscopy (SEM) images of the fabricated device. Reprinted with permission from Ref. [73], Copyright 2016, The Optical Society.
    (Color online) (a) The SOH phase modulator with an SiO2 film on top of the silicon strips which cover with the gate electrode. Reproduced with permission from Ref. [74]. Copyright 2011, Optical Society of America. (b) 100 GHz SOH phase modulator. Reproduced with permission from Ref. [10]. Copyright 2014, Nature Publishing Group. (c) Ultra-low half-wave voltage of 0.21 V SOH MZM. Reproduced with permission from Ref. [34]. Copyright 2018, Optical Society of America. (d) Capacitivity coupled SOH MZM with high-κ slotlines. Reproduced with permission from Ref.[75]. Copyright 2021, Optical Society of America. (e) High-temperature-resistant SOH MZM working up to 200 Gbit/s over 100 °C. Reproduced with permission from Ref. [77]. Copyright 2020, Nature Publishing Group. (f) The structure of SOH MZM by optimizing the strip-to-slot mode converter. Reproduced with permission from Ref. [78]. Copyright 2020, Optics and Precision Engineering.
    Fig. 5. (Color online) (a) The SOH phase modulator with an SiO2 film on top of the silicon strips which cover with the gate electrode. Reproduced with permission from Ref. [74]. Copyright 2011, Optical Society of America. (b) 100 GHz SOH phase modulator. Reproduced with permission from Ref. [10]. Copyright 2014, Nature Publishing Group. (c) Ultra-low half-wave voltage of 0.21 V SOH MZM. Reproduced with permission from Ref. [34]. Copyright 2018, Optical Society of America. (d) Capacitivity coupled SOH MZM with high-κ slotlines. Reproduced with permission from Ref.[75]. Copyright 2021, Optical Society of America. (e) High-temperature-resistant SOH MZM working up to 200 Gbit/s over 100 °C. Reproduced with permission from Ref. [77]. Copyright 2020, Nature Publishing Group. (f) The structure of SOH MZM by optimizing the strip-to-slot mode converter. Reproduced with permission from Ref. [78]. Copyright 2020, Optics and Precision Engineering.
    (Color online) (a) The relative size of all-organic, SOH and POH modulator. Reproduced with permission from Ref. [1]. Copyright 2017, American Chemical Society. (b) Variation of halfwave voltage (Vπ) with electrode length/device length (L) for various types of devices. Reproduced with permission from Ref. [79]. Copyright 2021, American Chemical Society. (c) Comparison measured (symbols) and computationally predicted (lines)VπL values for JRD1, DLD164, and BAH13 organic OEO materials at 1550 nm in a POH MZM. Reproduced with permission from Ref. [69]. Copyright 2022, Royal Society of Chemistry.
    Fig. 6. (Color online) (a) The relative size of all-organic, SOH and POH modulator. Reproduced with permission from Ref. [1]. Copyright 2017, American Chemical Society. (b) Variation of halfwave voltage (Vπ) with electrode length/device length (L) for various types of devices. Reproduced with permission from Ref. [79]. Copyright 2021, American Chemical Society. (c) Comparison measured (symbols) and computationally predicted (lines)VπL values for JRD1, DLD164, and BAH13 organic OEO materials at 1550 nm in a POH MZM. Reproduced with permission from Ref. [69]. Copyright 2022, Royal Society of Chemistry.
    (Color online) (a) A high-speed POH phase modulator designed and fabricated. Reproduced with permission from Ref. [11]. Copyright 2014, Nature Publishing Group. (b) POH MZM with metal-insulator-metal plasmonic slot waveguide. Reproduced with permission from Ref. [12]. Copyright 2015, Nature Publishing Group. (c) All-plasmonic MZM using a single metal layer without the silicon waveguide. Reproduced with permission from Ref. [38]. Copyright 2017, Nature Publishing Group. (d) Low-loss plasmonic electro-optic ring modulator. Reproduced with permission from Ref. [40]. Copyright 2018, Nature Publishing Group.
    Fig. 7. (Color online) (a) A high-speed POH phase modulator designed and fabricated. Reproduced with permission from Ref. [11]. Copyright 2014, Nature Publishing Group. (b) POH MZM with metal-insulator-metal plasmonic slot waveguide. Reproduced with permission from Ref. [12]. Copyright 2015, Nature Publishing Group. (c) All-plasmonic MZM using a single metal layer without the silicon waveguide. Reproduced with permission from Ref. [38]. Copyright 2017, Nature Publishing Group. (d) Low-loss plasmonic electro-optic ring modulator. Reproduced with permission from Ref. [40]. Copyright 2018, Nature Publishing Group.
    (Color online) (a) Beyond 500 GHz POH MZM used for sub-THz microwave photonics. Reproduced with permission from Ref. [41]. Copyright 2019. American Institute of Physics. (b) 222 GBd on-off-keying transmitter based on POH MZM. Reproduced with permission from Ref. [80]. Copyright 2020. Optical Society of America. (c) Compact IQ electro-optic modulator operated with sub-1-V driving electronics. Reproduced with permission from Ref. [42]. Copyright 2019. Nature Publishing Group. (d) Symbol rates 100 GBd monolithically integrated electro-optical transmitter based on POH MZM. Reproduced with permission from Ref. [44]. Copyright 2020. Nature Publishing Group.
    Fig. 8. (Color online) (a) Beyond 500 GHz POH MZM used for sub-THz microwave photonics. Reproduced with permission from Ref. [41]. Copyright 2019. American Institute of Physics. (b) 222 GBd on-off-keying transmitter based on POH MZM. Reproduced with permission from Ref. [80]. Copyright 2020. Optical Society of America. (c) Compact IQ electro-optic modulator operated with sub-1-V driving electronics. Reproduced with permission from Ref. [42]. Copyright 2019. Nature Publishing Group. (d) Symbol rates 100 GBd monolithically integrated electro-optical transmitter based on POH MZM. Reproduced with permission from Ref. [44]. Copyright 2020. Nature Publishing Group.
    Platform3-dB EO bandwidth (GHz)Vπ (V)Footprint (mm)Loss (dB/cm)
    SOH>60 (76[75])0.21 V[34]<1~20 (22[83])
    POH>100 (500[41])4.8 V[24]<0.02~500 (400[12])
    PCOH78[70]0.94[73]~0.3~200[73]
    LNOI>67 (110[81])1.4[81]5–20~0.3
    LN/Si70 (106[82])5.1[15]>5~1 (0.98[15])
    Table 1. The MZM on various EO platforms with operating principle of Pockels effect. The best result reported is given in parenthesis.
    Yan Wang, Tongtong Liu, Jiangyi Liu, Chuanbo Li, Zhuo Chen, Shuhui Bo. Organic electro-optic polymer materials and organic-based hybrid electro-optic modulators[J]. Journal of Semiconductors, 2022, 43(10): 101301
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