Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging

Ruxue Wei; Yanwei Wang; Liwen Jiang; Xuqing Sun; Hongyao Liu; Chang Wang; Xinchao Lu; Weier Lu; Yang Xia; Chengjun Huang

doi:10.3788/AOS201939.1124002

Journals >Acta Optica Sinica >Volume 39 >Issue 11 >Page 1124002 > Article

Acta Optica Sinica
Vol. 39, Issue 11, 1124002 (2019)

Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging

Ruxue Wei^1、3, Yanwei Wang^2、4, Liwen Jiang¹, Xuqing Sun¹, Hongyao Liu¹, Chang Wang^1、3, Xinchao Lu^1、*, Weier Lu^{2、5、6、**}, Yang Xia^2、5、6, and Chengjun Huang¹

Author Affiliations

¹Health Electronics Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

²Microelectronic Instrument and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

³University of Chinese Academy of Sciences, Beijing 100049, China

⁴Beijing Jiaotong University, Beijing 100044, China

⁵Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication, Beijing 100029, China

⁶Beijing Key Laboratory of Integrated Circuit Test Technology, Beijing 100088, China

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DOI: 10.3788/AOS201939.1124002 Cite this Article Set citation alerts

Ruxue Wei, Yanwei Wang, Liwen Jiang, Xuqing Sun, Hongyao Liu, Chang Wang, Xinchao Lu, Weier Lu, Yang Xia, Chengjun Huang. Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging[J]. Acta Optica Sinica, 2019, 39(11): 1124002 Copy Citation Text

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