• Acta Optica Sinica
  • Vol. 39, Issue 11, 1124002 (2019)
Ruxue Wei1、3, Yanwei Wang2、4, Liwen Jiang1, Xuqing Sun1, Hongyao Liu1, Chang Wang1、3, Xinchao Lu1、*, Weier Lu2、5、6、**, Yang Xia2、5、6, and Chengjun Huang1
Author Affiliations
  • 1Health Electronics Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2Microelectronic Instrument and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • 4Beijing Jiaotong University, Beijing 100044, China
  • 5Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication, Beijing 100029, China
  • 6Beijing Key Laboratory of Integrated Circuit Test Technology, Beijing 100088, China
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    DOI: 10.3788/AOS201939.1124002 Cite this Article Set citation alerts
    Ruxue Wei, Yanwei Wang, Liwen Jiang, Xuqing Sun, Hongyao Liu, Chang Wang, Xinchao Lu, Weier Lu, Yang Xia, Chengjun Huang. Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging[J]. Acta Optica Sinica, 2019, 39(11): 1124002 Copy Citation Text show less

    Abstract

    A method to quickly detect defects in chemical vapor deposition (CVD)-prepared graphene is proposed. After transferring the graphene prepared by CVD to the target substrate, a graphene-gold substrate is prepared for surface plasmon polariton (SPP) imaging. Since SPP imaging is highly sensitive to the change of refractive index on the interface, it is used for detection of the graphene edge. Furthermore, as the surface defects of the graphene change the distribution of SPP fields, the SPP field distribution transfers to the far-field due to SPP leakage radiation effect, which is quickly imaged by charge-coupled device. Herein, the morphologies of graphene edge and surface, defects, and impurities are detected. This method is an improvement on previous low sensitivity, low speed as well as damage detection of traditional detection method, and it achieves high-sensitivity, high-speed, and nondestructive detection for graphene.
    Ruxue Wei, Yanwei Wang, Liwen Jiang, Xuqing Sun, Hongyao Liu, Chang Wang, Xinchao Lu, Weier Lu, Yang Xia, Chengjun Huang. Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging[J]. Acta Optica Sinica, 2019, 39(11): 1124002
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