• Journal of Semiconductors
  • Vol. 43, Issue 6, 062801 (2022)
Huabin Yu, Muhammad Hunain Memon, Hongfeng Jia, Haochen Zhang, Meng Tian, Shi Fang, Danhao Wang, Yang Kang, Shudan Xiao, Shibing Long, and Haiding Sun
Author Affiliations
  • School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
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    DOI: 10.1088/1674-4926/43/6/062801 Cite this Article
    Huabin Yu, Muhammad Hunain Memon, Hongfeng Jia, Haochen Zhang, Meng Tian, Shi Fang, Danhao Wang, Yang Kang, Shudan Xiao, Shibing Long, Haiding Sun. A 10 × 10 deep ultraviolet light-emitting micro-LED array[J]. Journal of Semiconductors, 2022, 43(6): 062801 Copy Citation Text show less

    Abstract

    In this work, we design and fabricate a deep ultraviolet (DUV) light-emitting array consisting of 10 × 10 micro-LEDs (μ-LEDs) with each device having 20 μm in diameter. Strikingly, the array demonstrates a significant enhancement of total light output power by nearly 52% at the injection current of 100 mA, in comparison to a conventional large LED chip whose emitting area is the same as the array. A much higher (~22%) peak external quantum efficiency, as well as a smaller efficiency droop for μ-LED array, was also achieved. The numerical calculation reveals that the performance boost can be attributed to the higher light extraction efficiency at the edge of each μ-LED. Additionally, the far-field pattern measurement shows that the μ-LED array possesses a better forward directionality of emission. These findings shed light on the enhancement of the DUV LEDs performance and provide new insights in controlling the light behavior of the μ-LEDs.
    $ \text{WPE}=\text{EQE} \cdot \text{CIE}=\text{LOP}/(IV) $ (1)

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    Huabin Yu, Muhammad Hunain Memon, Hongfeng Jia, Haochen Zhang, Meng Tian, Shi Fang, Danhao Wang, Yang Kang, Shudan Xiao, Shibing Long, Haiding Sun. A 10 × 10 deep ultraviolet light-emitting micro-LED array[J]. Journal of Semiconductors, 2022, 43(6): 062801
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