• Infrared and Laser Engineering
  • Vol. 30, Issue 1, 66 (2001)
[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the formation mechanism of PtSi film by X-ray diffraction and X-ray photo spectrum[J]. Infrared and Laser Engineering, 2001, 30(1): 66 Copy Citation Text show less

    Abstract

    It is very important forformation of PtSi thin film to make the phases of thin film change into Pt
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the formation mechanism of PtSi film by X-ray diffraction and X-ray photo spectrum[J]. Infrared and Laser Engineering, 2001, 30(1): 66
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