EUV ablation of organic polymers at a high fluence

Chiara Liberatore; Klaus Mann; Matthias Muller; Ladislav Pina; Libor Juha; Jorge J. Rocca; Akira Endo; and Tomas Mocek

doi:10.1017/hpl.2014.31

Journals >High Power Laser Science and Engineering >Volume 2 >Issue 3 >Page 03000e26 > Article

High Power Laser Science and Engineering
Vol. 2, Issue 3, 03000e26 (2014)

EUV ablation of organic polymers at a high fluence

Chiara Liberatore^1、2, Klaus Mann³, Matthias Muller³, Ladislav Pina², Libor Juha¹, Jorge J. Rocca⁴, Akira Endo¹, and and Tomas Mocek¹

Author Affiliations

¹HiLASE Centre, Institute of Physics ASCR, v.v.i., Za Radnici 825, 25241 Dolni Brezany, Czech Republic

²Czech Technical University, Thakurova 2077/7, 160 00 Prague 6, Czech Republic

³Laser Laboratorium Gottingen (LLG), 37077 Gottingen, Germany

⁴Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA

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DOI: 10.1017/hpl.2014.31 Cite this Article Set citation alerts

Chiara Liberatore, Klaus Mann, Matthias Muller, Ladislav Pina, Libor Juha, Jorge J. Rocca, Akira Endo, and Tomas Mocek. EUV ablation of organic polymers at a high fluence[J]. High Power Laser Science and Engineering, 2014, 2(3): 03000e26 Copy Citation Text

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