• Chinese Optics Letters
  • Vol. 17, Issue 12, 121102 (2019)
Yijiang Shen1、*, Fei Peng1, Xiaoyan Huang1, and Zhenrong Zhang2
Author Affiliations
  • 1School of Automation, Guangdong University of Technology, Mega Education Center South, Guangzhou 510006, China
  • 2Guangxi Key Laboratory of Multimedia Communications and Network Technology, School of Computer, Electronics and Information, Guangxi University, Nanning 530004, China
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    DOI: 10.3788/COL201917.121102 Cite this Article Set citation alerts
    Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang. Adaptive gradient-based source and mask co-optimization with process awareness[J]. Chinese Optics Letters, 2019, 17(12): 121102 Copy Citation Text show less
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    Data from CrossRef

    [1] Lufeng Liao, Sikun Li, Xiangzhao Wang, Libin Zhang, Pengzheng Gao, Yayi Wei, Weijie Shi. Critical pattern selection method for full-chip source and mask optimization. Optics Express, 28, 20748(2020).

    Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang. Adaptive gradient-based source and mask co-optimization with process awareness[J]. Chinese Optics Letters, 2019, 17(12): 121102
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