Adaptive gradient-based source and mask co-optimization with process awareness

Yijiang Shen; Fei Peng; Xiaoyan Huang; Zhenrong Zhang

doi:10.3788/COL201917.121102

Journals >Chinese Optics Letters >Volume 17 >Issue 12 >Page 121102 > Article

Chinese Optics Letters
Vol. 17, Issue 12, 121102 (2019)

Adaptive gradient-based source and mask co-optimization with process awareness

Yijiang Shen^1、*, Fei Peng¹, Xiaoyan Huang¹, and Zhenrong Zhang²

Author Affiliations

¹School of Automation, Guangdong University of Technology, Mega Education Center South, Guangzhou 510006, China

²Guangxi Key Laboratory of Multimedia Communications and Network Technology, School of Computer, Electronics and Information, Guangxi University, Nanning 530004, China

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DOI: 10.3788/COL201917.121102 Cite this Article Set citation alerts

Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang. Adaptive gradient-based source and mask co-optimization with process awareness[J]. Chinese Optics Letters, 2019, 17(12): 121102 Copy Citation Text

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Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang. Adaptive gradient-based source and mask co-optimization with process awareness[J]. Chinese Optics Letters, 2019, 17(12): 121102

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