Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang. Adaptive gradient-based source and mask co-optimization with process awareness[J]. Chinese Optics Letters, 2019, 17(12): 121102
Abstract
(1) |
(2) |
(3) |
(4) |
(5) |
(6) |
(7) |
(8) |
(9) |
(10) |
(11) |
(12) |
(13) |
(14) |
(15) |
(16) |
(17) |
(18) |
Set citation alerts for the article
Please enter your email address