Yu GUO, Tong-Hua PENG, Chun-Jun LIU, Zhan-Wei YANG, Zhen-Li CAI. Correlation between Stacking Faults in Epitaxial Layers of 4H-SiC and Defects in 4H-SiC Substrate [J]. Journal of Inorganic Materials, 2019, 34(7): 748
Abstract
Set citation alerts for the article
Please enter your email address