Fuqian Li, Wenjing* Chen. Phase Error Analysis and Correction for Phase Shifting Profilometry Using Crossed Grating[J]. Acta Optica Sinica, 2021, 41(14): 1412002
- Acta Optica Sinica
- Vol. 41, Issue 14, 1412002 (2021)
Fig. 1. Schematic of measurement for crossed grating projection profilometry
Fig. 2. Spectrum of grating with nonlinear response. (a) Spectrum of horizontal grating; (b) spectrum of vertical grating; (c) spectrum of crossed grating
Fig. 3. STD of phase error distribution for crossed grating PSP with different phase shifting steps
Fig. 4. Phase error distribution of crossed grating PSP. (a) Horizontal phase error; (b) vertical phase error
Fig. 5. Comparison of phase error distribution. (a) Horizontal phase error; (b) vertical phase error
Fig. 6. Experimental setup
Fig. 7. Experimental results. (a) Captured grating image; (b) STD of phase errors distribution for crossed grating PSP with different phase shifting step
Fig. 8. Phase error distribution. (a) Horizontal phase error; (b) vertical phase error
Fig. 9. Phase error distribution of four methods. (a) Horizontal phase error; (b) vertical phase error
Fig. 10. Measurement results of a heart-shaped object. (a) Heart-shaped object; (b)(e)(g)(j) five-step PSP; (c)(h)(k) double five-step PSP; (d)(f)(i)(l) five-step PSP with Gamma correction
|
Table 1. Pre-encoded Gamma values calculated by horizontal sinusoidal grating and vertical sinusoidal grating
|
Table 2. Simulation results of the STD of phase errors for crossed grating PSP
|
Table 3. Simulation results of the STD of phase errors by three methods
|
Table 4. Experimental results of the STD of phase errors for crossed grating PSP
|
Table 5. Experimental results of the STD of phase errors by four methods
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20