[1] You Z, Ma L. Construction of a micro positioning navigation and timing system: A change of the pattern of PNT service[J]. Science & Technology Review, 33, 116-119(2015).

[2] Griffith W C, Knappe S, Kitching J. Femtotesla atomic magnetometry in a microfabricated vapor cell[J]. Optical Express, 18, 27167-27172(2010). http://meetings.aps.org/Meeting/DAMOP10/Session/L4.7

[3] Knappe S, Vishal S, Schwindt P et al. A microfabricated atomic clock[J]. Applied Physics Letters, 85, 1460-1462(2004).

[4] Liu P, Cheng H D, Meng Y L et al. Research on phase modulation of Ramsey fringes in integrating sphere cold atom clocks[J]. Chinese Journal of Lasers, 43, 1112001(2016).

[5] Yin Y, Zhang Y, Tan B Z et al. Study on characteristics of coherent population trapping spectral line for chip-scale atomic clock[J]. Acta Physica Sinica, 64, 312-317(2015).

[6] Li S L, Xu J, Zhang Z Q et al. A microfabricated 87Rb vapor cell with dual-chamber for chip scale atomic clock [J]. Infrared and Laser Engineering, 43, 1463-1468(2014).

[7] You Z, Ma B, Ruan Y et al. Microfabrication of MEMS alkali metal vapor cells for chip-scale atomic devices[J]. Optics and Precision Engineering, 21, 1440-1446(2013).

[8] Liu P F[J]. Industrialization of silicon wafer for VLSI The Scientific World Journal, 2013, 55-56.

[9] Jin L, Li Y F, Shen H L et al. Damage-removal and passivation of polycrystalline black silicon by reactive ion etching[J]. Acta Optica Sinica, 37, 0216001(2017).

[10] Rao L, Xin X J, Li D A et al. Parameter optimization of inductively coupled plasma and its application on multi-wavelength DFB laser array[J]. Laser & Optoelectronics Progress, 54, 031405(2017).

[11] Zhu B E, Wang X Z, Li S K et al. Aberration measurement method for hyper-NA lithographic projection lens[J]. Acta Optica Sinica, 36, 0112002(2016).

[12] Yu L F, Liang T, Xiong J J et al. Research on ICP deep etching process of 4H-SiC[J]. Transducer and Microsystem Technologies, 33, 8-10(2014).

[13] Li D D, Liang T, Li S N et al. Research on mask of ICP deep silicon etching process[J]. Transducer and Microsystem Technologies, 34, 29-31(2015).

[14] Xu G B, Huang H, Zhan M H et al. Experimental evaluation of inductively coupled plasma deep silicon etching[J]. Chinese Journal of Vacuum Science and Technology, 33, 832-835(2013).

[15] Nieradko L, Gorecki C, Douahi A et al. New approach of fabrication and dispensing of micromachined cesium vapor cell[J]. Journal of Micro/Nanolithography, MEMS, and MOEMS, 7, 033013(2008). http://spie.org/Publications/Journal/10.1117/1.2964288

[16] Briaudeau S, Bloch D, Ducloy M. Sub-doppler spectroscopy in a thin film of resonant vapor[J]. Physical Review A, 59, 3723-3735(1999). http://journals.aps.org/pra/abstract/10.1103/PhysRevA.59.3723

[17] Sargsyan A, Sarkisyan D, Papoyan A et al. Saturated absorption spectroscopy: Elimination of crossover resonances with the use of a nanocell[J]. Laser Physics, 18, 749-755(2008). http://link.springer.com/article/10.1134/S1054660X08060091