• Chinese Optics Letters
  • Vol. 13, Issue 3, 032201 (2015)
Jun Chen, Xueke Xu*, Chaoyang Wei, Minghong Yang, Jianxun Gu, and Jianda Shao
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    DOI: 10.3788/COL201513.032201 Cite this Article Set citation alerts
    Jun Chen, Xueke Xu, Chaoyang Wei, Minghong Yang, Jianxun Gu, Jianda Shao. Real-time surface figure monitoring of optical elements in continuous polishing[J]. Chinese Optics Letters, 2015, 13(3): 032201 Copy Citation Text show less

    Abstract

    A real-time monitoring system is set up based on a computer, dynamic interferometer, beam expanding system, and a beam reflecting system. The stability and repeatability of the monitoring system is verified. A workpiece and a glass monitoring plate are placed in the same ring. The surface figure of the workpiece, monitored by the monitoring plate, synchronizes with the surface of the glass monitoring plate in terms of peak–valley and power. The influence of the reflection and transmission surface are discussed in theory and a numeral deviation in online and offline testing data is quantitatively analyzed. The new method provides a quick and easy real-time method to characterize changes to the optical surface during polishing.
    Δself=2δupoutert+2δmaterial+δlowerinnerrδupouterr,(1)

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    δupoutert=(nn0)Δh1,δlowerinnerr=2nΔh2,δupouterr=2n0Δh1,(2)

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    Δself=2nΔh1+2nΔh2+2δmaterial.(3)

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    Δr=δair+δlowerouterr+(δfrontref),(4)

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    Δt=δair+2(δloweroutert+δmaterial+δupinnert)+(δfrontref)+(δrearref),(5)

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    δloweroutert=(nn0)Δh2,δlowerouterr=2n0Δh2,δupinnert=(nn0)Δh1,(6)

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    Δr=2n0Δh2+δair+(δfrontref),(7)

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    Δt=2(nn0)Δh1+2(nn0)Δh2+2δmaterial+δair+(δfrontref)+(δrearref).(8)

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    Δself=nn0Δr,Δself=nnn0Δt.(9)

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    Δself=1.53Δr,Δself=2.89Δt.(10)

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    Jun Chen, Xueke Xu, Chaoyang Wei, Minghong Yang, Jianxun Gu, Jianda Shao. Real-time surface figure monitoring of optical elements in continuous polishing[J]. Chinese Optics Letters, 2015, 13(3): 032201
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