Real-time surface figure monitoring of optical elements in continuous polishing

Jun Chen; Xueke Xu; Chaoyang Wei; Minghong Yang; Jianxun Gu; Jianda Shao

doi:10.3788/COL201513.032201

Journals >Chinese Optics Letters >Volume 13 >Issue 3 >Page 032201 > Article

Chinese Optics Letters
Vol. 13, Issue 3, 032201 (2015)

Real-time surface figure monitoring of optical elements in continuous polishing

Jun Chen, Xueke Xu^*, Chaoyang Wei, Minghong Yang, Jianxun Gu, and Jianda Shao

Author Affiliations

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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DOI: 10.3788/COL201513.032201 Cite this Article Set citation alerts

Jun Chen, Xueke Xu, Chaoyang Wei, Minghong Yang, Jianxun Gu, Jianda Shao. Real-time surface figure monitoring of optical elements in continuous polishing[J]. Chinese Optics Letters, 2015, 13(3): 032201 Copy Citation Text

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