Jie Chen, Jie Liu, Li Zhu, Xiao Deng, Xinbin Cheng, Tongbao Li. Optimization of Atom Flux in Atom Lithography[J]. Acta Optica Sinica, 2018, 38(12): 1202001
- Acta Optica Sinica
- Vol. 38, Issue 12, 1202001 (2018)
Fig. 1. Schematic of atom lithography
Fig. 2. Atomic furnace tube configuration. (a) First kind; (b) second kind
Fig. 3. Atomic furnace tube and its coordinate system. (a) Configuration; (b) coordinate system
Fig. 4. Relationship between nozzle blade angle and atom flux
Fig. 5. Eruption volume comparison among three kinds of atomic furnace tubes
Fig. 6. Schematic of atomic beam collimation
Fig. 7. Experimental result of morphology and profile of nano-grating fabricated by third kinds of furnace tube. (a) Atomic force microscope image of nano-grating; (b) profile comparison of nano-grating
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20