• Journal of Semiconductors
  • Vol. 41, Issue 12, 122801 (2020)
Rui Zhou1, Cui Yu1、2, Chuangjie Zhou1、2, Jianchao Guo1、2, Zezhao He1、2, Yanfeng Wang3, Feng Qiu3, Hongxing Wang3, Shujun Cai1, and Zhihong Feng1、2
Author Affiliations
  • 1Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
  • 2National Key Laboratory of ASIC, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
  • 3School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China
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    DOI: 10.1088/1674-4926/41/12/122801 Cite this Article
    Rui Zhou, Cui Yu, Chuangjie Zhou, Jianchao Guo, Zezhao He, Yanfeng Wang, Feng Qiu, Hongxing Wang, Shujun Cai, Zhihong Feng. Performance of hydrogenated diamond field-effect transistors on single and polycrystalline diamond[J]. Journal of Semiconductors, 2020, 41(12): 122801 Copy Citation Text show less
    References

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    [3] K Ueda, M Kasu, Y Yamauchi et al. Diamond FET using high-quality polycrystalline diamond with fT of 45 GHz and fmax of 120 GHz. IEEE Electron Device Lett, 27, 570(2006).

    [4] S Imanishi, K Horikawa, N Oi et al. 3.8 W/mm RF power density for ALD Al2O3-based two-dimensional hole gas diamond MOSFET operating at saturation velocity. IEEE Electron Device Lett, 40, 279(2018).

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    [12] H Sato, M Kasu. Maximum hole concentration for Hydrogen-terminated diamond surfaces with various surface orientations obtained by exposure to highly concentrated NO2. Diamond Relat Mater, 31, 47(2013).

    [13] S Yamanaka, D Takeuchi, H Watanabe et al. Low-compensated boron-doped homoepitaxial diamond films using trimethylboron. Phys Status Solidi A, 174, 59(1999).

    [14] K Hirama, K Tuge, S Sato et al. High performance p-channel diamond metal-oxide-semiconductor field-effect transistors on H-terminated (111) surface. Appl Phys Express, 3, 044001(2010).

    [15] S A O Russell, S Sharabi, A Tallaire et al. Hydrogen-terminated diamond field-effect transistors with cutoff frequency of 53 GHz. IEEE Electron Device Lett, 33, 1471(2012).

    [16] K Hirama, H Takayanagi, S Yamauchi et al. High-performance p-channel diamond MOSFETs with alumina gate insulator. IEDM Tech Dig, 873(2007).

    [17] V Camarchia, F Cappelluti, G Ghione et al. RF power performance evaluation of surface channel diamond MESFETs. Solid-State Electron, 55, 19(2011).

    [18] X X Yu, C J Zhou, C J Qi et al. A high frequency hydrogen-terminated diamond MISFET With fT/fmax of 70/80 GHz. IEEE Electron Device Lett, 39, 1373(2018).

    [19] P J Tasker, B Hughes. Importance of source and drain resistance to the maximum fT of millimeter-wave MODFETs. IEEE Electron Device Lett, 10, 291(1989).

    [20] T G Ivanov, J Wei, P B Shah et al. Diamond RF transistor technology with ft = 41 GHz and fmax = 44 GHz. IEEE/MTT-S International Microwave Symposium - IMS, 1461(2018).

    Rui Zhou, Cui Yu, Chuangjie Zhou, Jianchao Guo, Zezhao He, Yanfeng Wang, Feng Qiu, Hongxing Wang, Shujun Cai, Zhihong Feng. Performance of hydrogenated diamond field-effect transistors on single and polycrystalline diamond[J]. Journal of Semiconductors, 2020, 41(12): 122801
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