Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625
- Laser & Optoelectronics Progress
- Vol. 56, Issue 17, 170625 (2019)
Fig. 1. Schematic of sensor structure
Fig. 2. Change of reflected light intensity with fineness and phase
Fig. 3. Relationship between the radius and the sensitivity at different film thicknesses
Fig. 4. Process flow of sensor head fabrication. (a) Oxidative deposition protective layer; (b) lithography; (c) etching; (d) coating; (e) remove the protective layer; (f) bond
Fig. 5. Sensor spectrogram
Fig. 6. Initial cavity length of optical fiber F-P pressure sensor
Fig. 7. Fitting curves of pressure and cavity length
Fig. 8. Temperature characteristics of optical fiber F-P pressure sensor
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