• Laser & Optoelectronics Progress
  • Vol. 56, Issue 17, 170625 (2019)
Taojie Zhang**, Yi Jiang*, and Weiyi Ma
Author Affiliations
  • School of Opto-Electronics, Beijing Institute of Technology, Beijing 100081, China
  • show less
    DOI: 10.3788/LOP56.170625 Cite this Article Set citation alerts
    Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625 Copy Citation Text show less

    Abstract

    In this paper, a high-fineness optical fiber Fabry-Perot (F-P) pressure sensor based on micro-electro-mechanical system (MEMS) is proposed and experimentally demonstrated. The sensor is a high-fineness F-P interferometer formed by a silicon diaphragm and a Pyrex#7740 glass sheet both coated with high-reflection film. The change of pressure causes the length change of F-P cavity. Thus, based on the high-sensitive optical fiber white light interferometry, the pressure can be obtained by measuring the cavity length of the F-P. Experimental results show that the pressure sensor has properties of good measurement resolution, high linearity and low temperature drift characteristics.
    Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625
    Download Citation