Binghua Cao, Dedong Zheng, Mengbao Fan, Fengshan Sun, Lin Liu. Efficient and Reliable Thickness Measurement Method for Multilayer Coatings Based on Terahertz Time-Domain Spectroscopy Technology[J]. Acta Optica Sinica, 2022, 42(1): 0112001
- Acta Optica Sinica
- Vol. 42, Issue 1, 0112001 (2022)
Fig. 1. Schematic of THz wave propagation in a single-layer model
Fig. 2. Schematic of multi-layer structure deriving equivalent reflection coefficient
Fig. 3. Comparison of ergodicity between standard Kent chaotic map and improved Kent chaotic map
Fig. 4. Flow chart of adaptive TLBO algorithm
Fig. 5. Flow chart of thickness measured by model method
Fig. 6. THz-TDS diagram
Fig. 7. Schematic of THz-TDS principle
Fig. 8. Schematic of multilayer samples. (a) Single-layer paper sheet fixed on the metallic substrate; (b) double-layer paper sheet fixed on the metallic substrate
Fig. 9. TBC. (a) Surface morphology of top coating; (b) structure diagram; (c) electron microscope image
Fig. 10. THz measurement signal. (a) Sample 1; (b) sample 2
Fig. 11. Comparison of fitness between adaptive TLBO algorithm, standard TLBO, and global search in Ref. [20]
Fig. 12. Comparison of measurement signal and simulation signal. (a) Sample 1; (b) sample 2
Fig. 13. Signal of TBC sample. (a) THz measurement signal of TBC; (b) comparison of measurement signal and simulation signal of TBC
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Table 1. Adaptive TLBO algorithm functioning statistics table
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Table 2. Measurement parameters of sample 1 under the adaptive TLBO algorithm
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Table 3. Measurement parameters of sample 2 under the adaptive TLBO algorithm
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Table 4. Thickness results of sample 1 under the three algorithms
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Table 5. Thickness results of sample 2 under the three algorithms
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Table 6. Time consumption of the three algorithms in a single rununit: s
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Table 7. Results of TBC’s thickness under the three algorithms
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Table 8. Measurement parameters of TC under the adaptive TLBO algorithm
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Table 9. Single running time of three different algorithms for TBCunit: s
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