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    Journals >Acta Optica Sinica >Volume 42 >Issue 1 >Page 0112001 > Article
    • Acta Optica Sinica
    • Vol. 42, Issue 1, 0112001 (2022)
    Efficient and Reliable Thickness Measurement Method for Multilayer Coatings Based on Terahertz Time-Domain Spectroscopy Technology
    Binghua Cao1、*, Dedong Zheng1, Mengbao Fan2, Fengshan Sun2, and Lin Liu3
    Author Affiliations
  • 1School of Information and Control Engineering, China University of Mining and Technology, Xuzhou, Jiangsu 221000, China
  • 2School of Mechatronic Engineering, China University of Mining and Technology, Xuzhou, Jiangsu 221000, China
  • 3Beijing Institute of Aerospace Metrology and Measurement Technology, Beijing 100076, China
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    DOI: 10.3788/AOS202242.0112001 Cite this Article Set citation alerts
    Binghua Cao, Dedong Zheng, Mengbao Fan, Fengshan Sun, Lin Liu. Efficient and Reliable Thickness Measurement Method for Multilayer Coatings Based on Terahertz Time-Domain Spectroscopy Technology[J]. Acta Optica Sinica, 2022, 42(1): 0112001 Copy Citation Text show less
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    Article index updated: Jun. 12, 2024
    The article is cited by 4 article(s) CLP online library. (Some content might be in Chinese.)
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    Binghua Cao, Dedong Zheng, Mengbao Fan, Fengshan Sun, Lin Liu. Efficient and Reliable Thickness Measurement Method for Multilayer Coatings Based on Terahertz Time-Domain Spectroscopy Technology[J]. Acta Optica Sinica, 2022, 42(1): 0112001
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    Paper Information
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