Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip

Jiaxin Gu; Jie Liu; Ziqi Bai; Han Wang; Xinyu Cheng; Guanyu Li; Menghua Zhang; Xinxin Li; Qi Shi; Min Xiao; Xiaoshun Jiang

doi:10.1364/PRJ.412840

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