Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip

Jiaxin Gu; Jie Liu; Ziqi Bai; Han Wang; Xinyu Cheng; Guanyu Li; Menghua Zhang; Xinxin Li; Qi Shi; Min Xiao; Xiaoshun Jiang

doi:10.1364/PRJ.412840

Journals >Photonics Research >Volume 9 >Issue 5 >Page 722 > Article

Photonics Research
Vol. 9, Issue 5, 722 (2021)

Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip

Jiaxin Gu¹, Jie Liu¹, Ziqi Bai¹, Han Wang¹, Xinyu Cheng¹, Guanyu Li¹, Menghua Zhang¹, Xinxin Li¹, Qi Shi¹, Min Xiao^1、2, and Xiaoshun Jiang^1、*

Author Affiliations

¹National Laboratory of Solid State Microstructures, College of Engineering and Applied Science and School of Physics, Nanjing University, Nanjing 210093, China

²Department of Physics, University of Arkansas, Fayetteville, Arkansas 72701, USA

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DOI: 10.1364/PRJ.412840 Cite this Article Set citation alerts

Jiaxin Gu, Jie Liu, Ziqi Bai, Han Wang, Xinyu Cheng, Guanyu Li, Menghua Zhang, Xinxin Li, Qi Shi, Min Xiao, Xiaoshun Jiang. Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip[J]. Photonics Research, 2021, 9(5): 722 Copy Citation Text

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