[1] J M Shalf, R Leland. Computing beyond Moore's law. Computer, 48, 14(2015).

[2] M S Liu, Y Liu, H J Wang et al. Design of GeSn-based heterojunction-enhanced N-channel tunneling FET with improved subthreshold swing and ON-state current. IEEE Trans Electron Devices, 62, 1262(2015).

[3] Y Z Yue, Y Hao, J C Zhang et al. AlGaN/GaN MOS-HEMT with HfO₂ dielectric and Al₂O₃ interfacial passivation layer grown by atomic layer deposition. IEEE Electron Device Lett, 29, 838(2008).

[4] I L Markov. Limits on fundamental limits to computation. Nature, 512, 147(2014).

[5] P Wesling. The Heterogeneous integration roadmap: Enabling technology for systems of the future. 2020 Pan Pacific Microelectronics Symposium (Pan Pacific), 1(2020).

[6] J Shalf. The future of computing beyond Moore's Law. Phil Trans Royal Soc A, 378, 20190061(2020).

[7] J Pei, L Deng, S Song et al. Towards artificial general intelligence with hybrid Tianjic chip architecture. Nature, 572, 106(2019).

[8] W L Liu, M Li, R S Guzzon et al. A fully reconfigurable photonic integrated signal processor. Nat Photon, 10, 190(2016).

[9] D Thomson, A Zilkie, J E Bowers et al. Roadmap on silicon photonics. J Opt, 18, 073003(2016).

[10] D X Dai, Y L Yin, L H Yu et al. Silicon-plus photonics. Front Optoelectron, 9, 436(2016).

[11] Y C Shi, J Y Chen, H N Xu. Silicon-based on-chip diplexing/triplexing technologies and devices. Sci China Inf Sci, 61, 080402(2018).

[12] J S Guo, D X Dai. Silicon nanophotonics for on-chip light manipulation. Chin Phys B, 27, 104208(2018).

[13] H S Rong, S B Xu, Y H Kuo et al. Low-threshold continuous-wave Raman silicon laser. Nat Photon, 1, 232(2007).

[14] X C Sun, J F Liu, L C Kimerling et al. Toward a germanium laser for integrated silicon photonics. IEEE J Sel Top Quantum Electron, 16, 124(2010).

[15] G H Duan, C Jany, A Le Liepvre et al. Hybrid III–V on silicon lasers for photonic integrated circuits on silicon. IEEE J Sel Top Quantum Electron, 20, 158(2014).

[16] Y C Yang, P Gao, L Z Li et al. Electrochemical dynamics of nanoscale metallic inclusions in dielectrics. Nat Commun, 5, 4232(2014).

[17] F Pyatkov, V Fütterling, S Khasminskaya et al. Cavity-enhanced light emission from electrically driven carbon nanotubes. Nat Photon, 10, 420(2016).

[18] B G Chen, H Wu, C G Xin et al. Flexible integration of free-standing nanowires into silicon photonics. Nat Commun, 8, 20(2017).

[19] J L Liu, G M Xu, F G Liu et al. Recent advances in polymer electro-optic modulators. RSC Adv, 5, 15784(2015).

[20] H J Joyce, Q Gao, H Hoe Tan et al. III –V semiconductor nanowires for optoelectronic device applications. Prog Quantum Electron, 35, 23(2011).

[21] Y Q Bie, G Grosso, M Heuck et al. A MoTe₂-based light-emitting diode and photodetector for silicon photonic integrated circuits. Nat Nanotech, 12, 1124(2017).

[22] M Liu, X B Yin, E Ulin-Avila et al. A graphene-based broadband optical modulator. Nature, 474, 64(2011).

[23] K J Vahala. Optical microcavities. Nature, 424, 839(2003).

[24] Q H Song. Emerging opportunities for ultra-high Q whispering gallery mode microcavities. Sci China Phys Mech Astron, 62, 74231(2019).

[25] P B Deotare, M W McCutcheon, I W Frank et al. High quality factor photonic crystal nanobeam cavities. Appl Phys Lett, 94, 121106(2009).

[26] Q M Quan, P B Deotare, M Loncar. Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide. Appl Phys Lett, 96, 203102(2010).

[27] Y Zhang, M Khan, Y Huang et al. Photonic crystal nanobeam lasers. Appl Phys Lett, 97, 051104(2010).

[28] B H Ahn, J H Kang, M K Kim et al. One-dimensional parabolic-beam photonic crystal laser. Opt Express, 18, 5654(2010).

[29] Y Y Gong, B Ellis, G Shambat et al. Nanobeam photonic crystal cavity quantum dot laser. Opt Express, 18, 8781(2010).

[30] T W Lu, L H Chiu, P T Lin et al. One-dimensional photonic crystal nanobeam lasers on a flexible substrate. Appl Phys Lett, 99, 071101(2011).

[31] W S Fegadolli, S H Kim, P A Postigo et al. Hybrid single quantum well InP/Si nanobeam lasers for silicon photonics. Opt Lett, 38, 4656(2013).

[32] P T Lee, T W Lu, L H Chiu. Dielectric-band photonic crystal nanobeam lasers. J Lightwave Technol, 31, 36(2013).

[33] K Y Jeong, Y S No, Y Hwang et al. Electrically driven nanobeam laser. Nat Commun, 4, 2822(2013).

[34] N Niu, A Woolf, D Q Wang et al. Ultra-low threshold gallium nitride photonic crystal nanobeam laser. Appl Phys Lett, 106, 231104(2015).

[35] N V Triviño, R Butté, J F Carlin et al. Continuous wave blue lasing in III-nitride nanobeam cavity on silicon. Nano Lett, 15, 1259(2015).

[36] Z L Yang, M Pelton, I Fedin et al. A room temperature continuous-wave nanolaser using colloidal quantum wells. Nat Commun, 8, 143(2017).

[37] J Lee, I Karnadi, J T Kim et al. Printed nanolaser on silicon. ACS Photonics, 4, 2117(2017).

[38] Y Z Li, J X Zhang, D D Huang et al. Room-temperature continuous-wave lasing from monolayer molybdenum ditelluride integrated with a silicon nanobeam cavity. Nat Nanotech, 12, 987(2017).

[39] S T Jagsch, N V Triviño, F Lohof et al. A quantum optical study of thresholdless lasing features in high-β nitride nanobeam cavities. Nat Commun, 9, 564(2018).

[40] Z He, B Chen, Y Hua et al. CMOS compatible high-performance nanolasing based on perovskite-SiN hybrid integration. Adv Opt Mater, 8, 2000453(2020).

[41] S F Wu, S Buckley, J R Schaibley et al. Monolayer semiconductor nanocavity lasers with ultralow thresholds. Nature, 520, 69(2015).

[42] R S Jacobsen, K N Andersen, P I Borel et al. Strained silicon as a new electro-optic material. Nature, 441, 199(2006).

[43] M Hochberg, T Baehr-Jones, G X Wang et al. Terahertz all-optical modulation in a silicon–polymer hybrid system. Nat Mater, 5, 703(2006).

[44] R Soref, B Bennett. Electrooptical effects in silicon. IEEE J Quantum Electron, 23, 123(1987).

[45] B Qi, P Yu, Y B Li et al. Analysis of electrooptic modulator with 1-D slotted photonic crystal nanobeam cavity. IEEE Photon Technol Lett, 23, 992(2011).

[46] M R Javid, M Miri, A Zarifkar. Design of a compact high-speed optical modulator based on a hybrid plasmonic nanobeam cavity. Opt Commun, 410, 652(2018).

[47] J Hendrickson, R Soref, J Sweet et al. Ultrasensitive silicon photonic-crystal nanobeam electro-optical modulator: Design and simulation. Opt Express, 22, 3271(2014).

[48] A Shakoor, K Nozaki, E Kuramochi et al. Compact 1D-silicon photonic crystal electro-optic modulator operating with ultra-low switching voltage and energy. Opt Express, 22, 28623(2014).

[49] Z Jafari, A Zarifkar, M Miri et al. All-optical modulation in a graphene-covered slotted silicon nano-beam cavity. J Lightwave Technol, 36, 4051(2018).

[50] M Liu, X B Yin, X Zhang. Double-layer graphene optical modulator. Nano Lett, 12, 1482(2012).

[51] C Y Qiu, W L Gao, R Vajtai et al. Efficient modulation of 1.55 μm radiation with gated graphene on a silicon microring resonator. Nano Lett, 14, 6811(2014).

[52] W Du, E P Li, R Hao. Tunability analysis of a graphene-embedded ring modulator. IEEE Photon Technol Lett, 26, 2008(2014).

[53] T Pan, C Y Qiu, J Y Wu et al. Analysis of an electro-optic modulator based on a graphene-silicon hybrid 1D photonic crystal nanobeam cavity. Opt Express, 23, 23357(2015).

[54] H Q Liu, P G Liu, L A Bian et al. Electro-optic modulator side-coupled with a photonic crystal nanobeam loaded graphene/ Al₂O₃ multilayer stack. Opt Mater Express, 8, 761(2018).

[55] S I Inoue, A Otomo. Electro-optic polymer/silicon hybrid slow light modulator based on one-dimensional photonic crystal waveguides. Appl Phys Lett, 103, 171101(2013).

[56] H Yan, X C Xu, C J Chung et al. One-dimensional photonic crystal slot waveguide for silicon-organic hybrid electro-optic modulators. Opt Lett, 41, 5466(2016).

[57] J D Witmer, J T Hill, A H Safavi-Naeini. Design of nanobeam photonic crystal resonators for a silicon-on-lithium-niobate platform. Opt Express, 24, 5876(2016).

[58] J D Witmer, J A Valery, P Arrangoiz-Arriola et al. High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate. Sci Rep, 7, 46313(2017).

[59] W S Fegadolli, J E B Oliveira, V R Almeida et al. Compact and low power consumption tunable photonic crystal nanobeam cavity. Opt Express, 21, 3861(2013).

[60] B Hadian Siahkal-Mahalle, K Abedi. Ultra-compact low loss electro-optical nanobeam cavity modulator embedded photonic crystal. Opt Quant Electron, 51, 128(2019).

[61] K I Bolotin, K J Sikes, Z Jiang et al. Ultrahigh electron mobility in suspended graphene. Solid State Commun, 146, 351(2008).

[62] K F Mak, M Y Sfeir, Y Wu et al. Measurement of the optical conductivity of graphene. Phys Rev Lett, 101, 196405(2008).

[63] Y W Yin, R Proietti, X H Ye et al. LIONS: An AWGR-based low-latency optical switch for high-performance computing and data centers. IEEE J Sel Top Quantum Electron, 19, 3600409(2013).

[64] K Chen, A Singla, A Singh et al. OSA: an optical switching architecture for data center networks with unprecedented flexibility. IEEE/ACM Trans Networking, 22, 498(2014).

[65] C Y Qiu, W L Gao, R Soref et al. Reconfigurable electro-optical directed-logic circuit using carrier-depletion micro-ring resonators. Opt Lett, 39, 6767(2014).

[66] H L R Lira, S Manipatruni, M Lipson. Broadband hitless silicon electro-optic switch for on-chip optical networks. Opt Express, 17, 22271(2009).

[67] P Dong, S R Liao, H Liang et al. Submilliwatt, ultrafast and broadband electro-optic silicon switches. Opt Express, 18, 25225(2010).

[68] H Y Zhou, C Y Qiu, Z Z Xu et al. A 2 × 2 silicon thermo-optic switch based on nanobeam cavities with ultra-small mode volumes. 2016 IEEE 13th International Conference on Group IV Photonics (GFP), 10(2016).

[69] H Y Zhou, C Y Qiu, X H Jiang et al. Compact, submilliwatt, 2 × 2 silicon thermo-optic switch based on photonic crystal nanobeam cavities. Photon Res, 5, 108(2017).

[70] Z W Cheng, J J Dong, X L Zhang. Ultracompact optical switch using a single semisymmetric Fano nanobeam cavity. Opt Lett, 45, 2363(2020).

[71] R Soref, J Hendrickson. Proposed ultralow-energy dual photonic-crystal nanobeam devices for on-chip N × N switching, logic, and wavelength multiplexing. Opt Express, 23, 32582(2015).

[72] R Soref, J R Hendrickson, J Sweet. Simulation of germanium nanobeam electro-optical 2 × 2 switches and 1 × 1 modulators for the 2 to 5 µm infrared region. Opt Express, 24, 9369(2016).

[73] H Y Zhou, C Y Qiu, J Y Wu et al. 2 × 2 electro-optic switch with fJ/bit switching power based on dual photonic crystal nanobeam cavities. Conference on Lasers and Electro-Optics, JTh2A.105(2016).

[74] A Bazin, K Lenglé, M Gay et al. Ultrafast all-optical switching and error-free 10 Gbit/s wavelength conversion in hybrid InP-silicon on insulator nanocavities using surface quantum wells. Appl Phys Lett, 104, 011102(2014).

[75] G N Dong, W T Deng, J Hou et al. Ultra-compact multi-channel all-optical switches with improved switching dynamic characteristics. Opt Express, 26, 25630(2018).

[76] Z M Meng, C B Chen, F Qin. Theoretical investigation of integratable photonic crystal nanobeam all-optical switching with ultrafast response and ultralow switching energy. J Phys D, 53, 205105(2020).

[77] Y Liu, F Qin, Z M Meng et al. All-optical logic gates based on two-dimensional low-refractive-index nonlinear photonic crystal slabs. Opt Express, 19, 1945(2011).

[78] K Lengle, T N Nguyen, M Gay et al. Modulation contrast optimization for wavelength conversion of a 20 Gbit/s data signal in hybrid InP/SOI photonic crystal nanocavity. Opt Lett, 39, 2298(2014).

[79] H Ji, M Galili, H Hu et al. 1.28-Tb/s demultiplexing of an OTDM DPSK data signal using a silicon waveguide. IEEE Photon Technol Lett, 22, 1762(2010).

[80] G N Dong, Y L Wang, X L Zhang. High-contrast and low-power all-optical switch using Fano resonance based on a silicon nanobeam cavity. Opt Lett, 43, 5977(2018).

[81] Z M Meng, Y H Hu, C Wang et al. Design of high-Q silicon-polymer hybrid photonic crystal nanobeam microcavities for low-power and ultrafast all-optical switching. Photonics Nanostruct, 12, 83(2014).

[82] M Asghari, A V Krishnamoorthy. Energy-efficient communication. Nat Photon, 5, 268(2011).

[83] J Pan, Y J Huo, K Yamanaka et al. Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning. Appl Phys Lett, 92, 103114(2008).

[84] M Eichenfield, R Camacho, J Chan et al. A picogram- and nanometre-scale photonic-crystal optomechanical cavity. Nature, 459, 550(2009).

[85] M Li, W H P Pernice, H X Tang. Tunable bipolar optical interactions between guided lightwaves. Nat Photon, 3, 464(2009).

[86] L L Gu, W Jiang, X N Chen et al. Thermooptically tuned photonic crystal waveguide silicon-on-insulator Mach–Zehnder interferometers. IEEE Photon Technol Lett, 19, 342(2007).

[87] R L Espinola, M C Tsai, J T Yardley et al. Fast and low-power thermooptic switch on thin silicon-on-insulator. IEEE Photon Technol Lett, 15, 1366(2003).

[88] P Dong, W Qian, H Liang et al. Thermally tunable silicon racetrack resonators with ultralow tuning power. Opt Express, 18, 20298(2010).

[89] Y Zhang, Y He, Q M Zhu et al. Single-resonance silicon nanobeam filter with an ultra-high thermo-optic tuning efficiency over a wide continuous tuning range. Opt Lett, 43, 4518(2018).

[90]

[91]

[92] A Sharma, S R Xie, R Zeltner et al. On-the-fly particle metrology in hollow-core photonic crystal fibre. Opt Express, 27, 34496(2019).

[93] Y F Xiao, Q H Gong. Optical microcavity: From fundamental physics to functional photonics devices. Sci Bull, 61, 185(2016).

[94] Y Y Zhi, X C Yu, Q H Gong et al. Single nanoparticle detection using optical microcavities. Adv Mater, 29, 1604920(2017).

[95] L B Shao, X F Jiang, X C Yu et al. Detection of single nanoparticles and lentiviruses using microcavity resonance broadening. Adv Mater, 25, 5616(2013).

[96] B B Li, W R Clements, X C Yu et al. Single nanoparticle detection using split-mode microcavity Raman lasers. PNAS, 111, 14657(2014).

[97] D Q Yang, A Q Wang, J H Chen et al. Real-time monitoring of hydrogel phase transition in an ultrahigh Q microbubble resonator. Photonics Res, 8, 497(2020).

[98] D Q Yang, B Duan, X Liu et al. Photonic crystal nanobeam cavities for nanoscale optical sensing: A review. Micromachines, 11, 72(2020).

[99] Q M Quan, D L Floyd, I B Burgess et al. Single particle detection in CMOS compatible photonic crystal nanobeam cavities. Opt Express, 21, 32225(2013).

[100] M G A Rahman, P Velha, R M de la Rue et al. Silicon-on-insulator (SOI) nanobeam optical cavities for refractive index based sensing. Opt Sens Detect II, 8439, 84391Q(2012).

[101] K Y Yao, Y C Shi. High-Q width modulated photonic crystal stack mode-gap cavity and its application to refractive index sensing. Opt Express, 20, 27039(2012).

[102] Q M Quan, I B Burgess, S K Y Tang et al. High-Q, low index-contrast polymeric photonic crystal nanobeam cavities. Opt Express, 19, 22191(2011).

[103] P P Xu, K Y Yao, J J Zheng et al. Slotted photonic crystal nanobeam cavity with parabolic modulated width stack for refractive index sensing. Opt Express, 21, 26908(2013).

[104] D Q Yang, S Kita, F Liang et al. High sensitivity and high Q-factor nanoslotted parallel quadrabeam photonic crystal cavity for real-time and label-free sensing. Appl Phys Lett, 105, 063118(2014).

[105] S Kim, H M Kim, Y H Lee. Single nanobeam optical sensor with a high Q-factor and high sensitivity. Opt Lett, 40, 5351(2015).

[106] G A Rodriguez, P Markov, A P Cartwright et al. Photonic crystal nanobeam biosensors based on porous silicon. Opt Express, 27, 9536(2019).

[107] A Gopinath, E Miyazono, A Faraon et al. Engineering and mapping nanocavity emission via precision placement of DNA origami. Nature, 535, 401(2016).

[108] S Mandal, D Erickson. Nanoscale optofluidic sensor arrays. Opt Express, 16, 1623(2008).

[109] D Q Yang, C Wang, Y F Ji. Silicon on-chip 1D photonic crystal nanobeam bandstop filters for the parallel multiplexing of ultra-compact integrated sensor array. Opt Express, 24, 16267(2016).

[110] H Hagino, Y Takahashi, Y Tanaka et al. Effects of fluctuation in air hole radii and positions on optical characteristics in photonic crystal heterostructure nanocavities. Phys Rev B, 79, 085112(2009).

[111] F O Afzal, S I Halimi, S M Weiss. Efficient side-coupling to photonic crystal nanobeam cavities via state-space overlap. J Opt Soc Am B, 36, 585(2019).

[112] F Liang, N Clarke, P Patel et al. Scalable photonic crystal chips for high sensitivity protein detection. Opt Express, 21, 32306(2013).

[113] I W Frank, P B Deotare, M W McCutcheon et al. Programmable photonic crystal nanobeam cavities. Opt Express, 18, 8705(2010).

[114] D Panettieri, L O'Faolain, M Grande. Control of Q-factor in nanobeam cavities on substrate. 2016 18th International Conference on Transparent Optical Networks (ICTON), 1(2016).

[115] Y L Xiong, J G Wangüemert-Pérez, D X Xu et al. Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance. Opt Lett, 39, 6931(2014).