Recent progress in integrated electro-optic frequency comb generation

Hao Sun; Mostafa Khalil; Zifei Wang; Lawrence R. Chen

doi:10.1088/1674-4926/42/4/041301

Journals >Journal of Semiconductors >Volume 42 >Issue 4 >Page 041301 > Article

Journal of Semiconductors
Vol. 42, Issue 4, 041301 (2021)

Recent progress in integrated electro-optic frequency comb generation

Hao Sun, Mostafa Khalil, Zifei Wang, and Lawrence R. Chen

DOI: 10.1088/1674-4926/42/4/041301 Cite this Article

Hao Sun, Mostafa Khalil, Zifei Wang, Lawrence R. Chen. Recent progress in integrated electro-optic frequency comb generation[J]. Journal of Semiconductors, 2021, 42(4): 041301 Copy Citation Text

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Fig. 1. (Color online) (a) Generic setup for OFC generation. (b) Schematic of a DD-MZM.

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(Color online) (a) Schematic of an intracavity MRM. (b) Transmission spectrum of an MRM (the input laser wavelength is shown in red for illustration).

Fig. 2. (Color online) (a) Schematic of an intracavity MRM. (b) Transmission spectrum of an MRM (the input laser wavelength is shown in red for illustration).

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Fig. 3. (Color online) OFC generation using different driving conditions: (a)

, (b)

, and (c)

. The blue and red lines depict the output from the first and second modulator, respectively.

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Fig. 4. (Color online) Schematic of the InP-based OFC generator in Refs. [44, 45]. SMF: single mode fiber; MMI: multimode interferometer; DBR: distributed Bragg reflector; PM: phase modulator; SOA: semiconductor optical amplifier.

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Fig. 5. (Color online) Typical experimental setup for OFC generation using (a) single MRM, (b) cascaded MRMs.

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Fig. 6. (Color online) (a) Schematic of the proposed MRM. (b) Cross-section of the PN junction of the ring. (c) Microscopic image of one MRM. (d) S₁₁ and S₂₁ measurements of one MRM.

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Fig. 7. (Color online) Transmission spectrum of one MRM in (a) forward bias and (b) reverse bias.

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Fig. 8. (Color online) (a) Experimental setup. (b) Driving MRM 1 with 10 GHz and MRM 2 with 5 GHz. (c) Driving MRM 1 with 5 GHz and MRM 2 with 15 GHz. (d) Comb spectrum demonstrating 5 lines when driving MRM 1 at 20 GHz and MRM 2 at 10 GHz. (e) Temporal waveform of (b). (f) Temporal waveform of (c).

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Fig. 9. (Color online) Schematic of cascaded MZMs for OFC generation.

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Fig. 10. (Color online) Schematic of integrated cascaded MZM and PM (after Ref. [48]) and cascaded MZMs for EO OFC (after Ref. [53]).

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Fig. 11. (Color online) Schematic of the OFC generator in silicon photonics.

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Fig. 12. (Color online) Experimental results of the OFC in silicon photonics. (a–c) the OFCs with spacing from 5, 7.5, and 10 GHz; left: spectral profile; right: temporal signals.

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Parameter	Value	Parameter	Value
h₁	220 nm	W_N+	0.81 μm
h₂	90 nm	W_N	0.39 μm
h₃	2 μm	W_P++	28 μm
W	500 nm	W_P+	0.83 μm
W_N++	5.2 μm	W_P	0.37 μm

Table 1. Parameters of the TW-MZM^[51].

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Reference	Schematic	Number of comb lines	Comb spacing (GHz)	Flatness(dB)	(V)	(V·cm)	Insertion loss (dB)
InP
[42]	Single MZM	9	12.5	< 0.77	2.3	N/A	N/A
[43]	On-chip laser, MZM	29/5	10/20	< 3	2.7	N/A	6
[44]	On-chip laser, MZM + 2 PMs	28/11	5/10	< 5/10	5	0.5	N/A
[45]	Same as Ref. [44]	44/17	1/3	< 3	5	0.5	N/A
LNOI
[38]	Single PM	> 40	30	~ 10 dB for the central 30 comb lines	4.5	9	< 1
[41]	PM with FP resonator	18	16.3	amplitude roll off of 18 dB/nm	N/A	N/A	1.4
[20]	PM with microring resonator	> 900	10.453	amplitude roll off of 1 dB/nm	8.3	5.1	N/A
SOI
[34]	Single MRM	5	10	~ 0.7	1	N/A	5.5
[47]	MRM + microring filter	12	10	< 0.86	N/A	N/A	N/A
[48]	Cascaded MRM	5	10	~ 8	N/A	N/A	13
[50]	Cascaded MRM	5	10	~ 4	N/A	1.6	26
[17]	DD-MZM	5	20	~ 9	6	2.7	N/A
[52]	MZM + PM	15	5	< 6	3	0.9	N/A
[53]	Cascaded MZM	9	5	< 1.8	3	0.9	20
[51]	Cascaded MZM	9	5/7.5/10	< 3.8/4.7/6.5	10	4.2	24

Table 2. Summary of integrated EO OFC generation results.

Hao Sun, Mostafa Khalil, Zifei Wang, Lawrence R. Chen. Recent progress in integrated electro-optic frequency comb generation[J]. Journal of Semiconductors, 2021, 42(4): 041301

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