Liangliang Yang, Chenglin Liu, Fahua Shen, Yongbing Zhao. Diffraction Efficiency of Diffractive Optical Elements with Antireflection Coatings Within a Certain Incident Angle Range[J]. Acta Optica Sinica, 2021, 41(12): 1205002
- Acta Optica Sinica
- Vol. 41, Issue 12, 1205002 (2021)
Fig. 1. Profile of single layer DOE with antireflection coatings. (a) Profile of DOE with antireflection coatings; (b) four layers antireflection coatings
Fig. 2. Structure of multilayer DOEs with antireflection coatings
Fig. 3. Diffraction efficiency of single layer DOEs with antireflection coatings. (a) ZnSe; (b) ZnS
Fig. 4. Modified diffraction efficiency of single layer DOEs. (a) ZnSe; (b) ZnS
Fig. 5. Modified microstructure height of single layer DOEs. (a) ZnSe; (b) ZnS
Fig. 6. Modified PIDE of single layer DOEs. (a) 0°-15°; (b) 0°-30°
Fig. 7. Diffraction efficiency of multilayer DOEs. (a) Theoretical diffraction efficiency; (b) actual diffraction efficiency; (c) modified diffraction efficiency
Fig. 8. Modified microstructure heights of multilayer DOEs. (a) ZnSe; (b) ZnS
Fig. 9. Modified diffraction efficiency versus incident angle for multilayer DOEs. (a) 0°-10°; (b) 0°-20°
Fig. 10. Modified PIDE versus incident angle for multilayer DOEs . (a) 0°-10°; (b) 0°-20°
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Table 1. Average polychromatic integral diffraction efficiency (PIDE)and modified microstructure height of single layer DOEs
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Table 2. Average polychromatic integral diffraction efficiency (PIDE) of the single layer DOEs within a certain range of incident angle%
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Table 3. Average polychromatic integral diffraction efficiency of multilayer DOEs%
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