In the systems of micro positioning, navigation and timing (Micro-PNT), the chip-scale atomic clock (CSAC) serves as the core of physical micro-clock module, whose development has a strong connection with positioning accuracy and timing ability of micro-PNT system. As the key part of CSAC, the atom vapor cell directly determines the volume, stability and power consumption of the atomic clock. With the reduction of power consumption and volume of atomic clock, it is imperative to manufacture corresponding micro atom vapor cell. Taking realization of atom vapor cell processing technology as our targets, traditional glass blowing and micro-electromechanical system (MEMS) techniques are studied in this dissertation. Based on the research of atom vapor cell, this overview summarizes great progress in the past few years and analyzes the shortage of current preparation technology, giving an importance guidance to the preparation technology of vapor cell in the future.