Pin Cao, Yongying Yang, Chen Li, Huiting Chai, Yang Li, Shibin Xie, Dong Liu. Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics[J]. Chinese Optics Letters, 2015, 13(4): 041102
- Chinese Optics Letters
- Vol. 13, Issue 4, 041102 (2015)
Fig. 1. Principle of SDES.
Fig. 2. Sub-aperture (a) sampling and (b) stitching with coordinate error.
Fig. 3. Performance of SLCA.
Fig. 4. Edge images that are sampled at high magnification; (a) in-focus edge image; (b) estimated boundary line of a defocus edge image.
Fig. 5. Cropped edge images the focus curves; (a) cropped edge images that are sampled by the step length of 50 μm; (b) fitted focus curves of edge images.
Fig. 6. Spatial relation model of defocus depths and leveling mechanism.
Fig. 7. Sub-apertures (a) A 11 A 1 i
Fig. 8. Sub-aperture array stitching result, 3 × 3
Fig. 9. Large-aperture stitching result; 320 mm × 320 mm
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