Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics

Pin Cao; Yongying Yang; Chen Li; Huiting Chai; Yang Li; Shibin Xie; Dong Liu

doi:10.3788/COL201513.041102

Journals >Chinese Optics Letters >Volume 13 >Issue 4 >Page 041102 > Article

Chinese Optics Letters
Vol. 13, Issue 4, 041102 (2015)

Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics

Pin Cao, Yongying Yang^*, Chen Li, Huiting Chai, Yang Li, Shibin Xie, and Dong Liu

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State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China

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DOI: 10.3788/COL201513.041102 Cite this Article Set citation alerts

Pin Cao, Yongying Yang, Chen Li, Huiting Chai, Yang Li, Shibin Xie, Dong Liu. Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics[J]. Chinese Optics Letters, 2015, 13(4): 041102 Copy Citation Text

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