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    Journals >Journal of Semiconductors >Volume 42 >Issue 12 >Page 122805 > Article
    • Journal of Semiconductors
    • Vol. 42, Issue 12, 122805 (2021)
    Humidity sensing properties of spray deposited Fe doped TiO2 thin film
    Dipak L Gapale1, Pranav P. Bardapurkar1, Sandeep A. Arote1, Sanjaykumar Dalvi1..., Prashant Baviskar1 and Ratan Y Borse2|Show fewer author(s)
    Author Affiliations
  • 1S. N. Arts, D. J. M. Commerce and B. N. S. Science College Sangamner, District Ahmednagar 422 605 MS, India
  • 2Thin and Thick film Laboratory, Department of Electronics, M. S. G. College, Malegaon Camp (Pin 423105), District Nashik, Maharashtra, India
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    DOI: 10.1088/1674-4926/42/12/122805 Cite this Article
    Dipak L Gapale, Pranav P. Bardapurkar, Sandeep A. Arote, Sanjaykumar Dalvi, Prashant Baviskar, Ratan Y Borse. Humidity sensing properties of spray deposited Fe doped TiO2 thin film[J]. Journal of Semiconductors, 2021, 42(12): 122805 Copy Citation Text show less
    XRD patterns for pristine and Fe-doped TiO2 thin films annealed at 500 °C (# rutile).
    Fig. 1. XRD patterns for pristine and Fe-doped TiO2 thin films annealed at 500 °C (# rutile).
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    SEM image for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
    Fig. 2. SEM image for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
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    EDX spectrum of (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
    Fig. 3. EDX spectrum of (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
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    (Color online) Variation of resistance with temperature for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
    Fig. 4. (Color online) Variation of resistance with temperature for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
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    (Color online) Variation of log(Ra) with temperature to calculated TCR for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
    Fig. 5. (Color online) Variation of log(Ra) with temperature to calculated TCR for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
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    (Color online) Variation of log(Ra) with 1000/T to calculate activation energy for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
    Fig. 6. (Color online) Variation of log(Ra) with 1000/T to calculate activation energy for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
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    (Color online) Variation of resistance with percentage of relative humidity for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
    Fig. 7. (Color online) Variation of resistance with percentage of relative humidity for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
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    (Color online) Variation of sensitivity with percentage of relative humidity for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
    Fig. 8. (Color online) Variation of sensitivity with percentage of relative humidity for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
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    (Color online) Variation of sensitivity with percentage of relative humidity for different time interval for 2 vol% Fe :TiO2 sample.
    Fig. 9. (Color online) Variation of sensitivity with percentage of relative humidity for different time interval for 2 vol% Fe :TiO2 sample.
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    (Color online) Hysteresis loops for for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
    Fig. 10. (Color online) Hysteresis loops for for (a) pristine TiO2, (b) 1 vol% Fe:TiO2, (c) 2 vol% Fe:TiO2 and (d) 4 vol% Fe:TiO2 samples.
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    (Color online) Variation of resistance with time to calculate response and recovery time for pristine TiO2, 1 vol% Fe:TiO2, 2 vol% Fe:TiO2 and 4 vol% Fe:TiO2 samples.
    Fig. 11. (Color online) Variation of resistance with time to calculate response and recovery time for pristine TiO2, 1 vol% Fe:TiO2, 2 vol% Fe:TiO2 and 4 vol% Fe:TiO2 samples.
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    (Color online) Variation sensitivity and response time with different Fe vol% for Fe doped TiO2 thin films.
    Fig. 12. (Color online) Variation sensitivity and response time with different Fe vol% for Fe doped TiO2 thin films.
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    SampleFe (vol%) Crystallite size (nm) Interplaner distance (Å) Crystal phase Texture coefficient Microstain (10–3) Dislocation (1014 cm–2) Specific surface area (m2/g)
    Pristine–31.212603.513233A1.56221.76410.264649.416
    1 vol% Fe:TiO2128.256483.514076A1.49961.8712.524654.586
    2 vol% Fe:TiO2225.078733.511046A1.07881.9015.899761.502
    4 vol% Fe:TiO2424.696043.510535A - 90.77 % R - 9.23 % 0.47552.4816.396362.456
    Table 1. Structural properties of pristine and Fe-doped TiO2 thin films.
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    SampleFe (vol%)Oxygen (at%)Titanium (at%)Fe (at%)
    Pristine–81.0818.92–
    1 vol% Fe:TiO2184.6114.231.16
    2 vol% Fe:TiO2286.1412.291.57
    4 vol% Fe:TiO2487.2811.121.80
    Table 2. EDX spectrum for pristine and Fe-doped TiO2 thin films.
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    SampleFe (vol%)Room temp. resistance (MΩ)TCR (°C–1) Activation energy(eV)
    HeatingCoolingHeatingCooling
    Pristine–382.4800–0.00140–0.0073930.33950.3537
    1 vol% Fe:TiO21384.7108–0.00124–0.0057360.44990.4673
    2 vol% Fe:TiO22258.5140–0.00081–0.0011720.49470.5137
    4 vol% Fe:TiO24212.2913–0.00034–0.0007380.52010.5348
    Table 3. Electrical resistance, TCR and activation energy for pristine and Fe-doped TiO2 thin films.
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    SampleFe (vol%)SensitivityResponse time (s)Recovery time (s)% of hysteresis loss
    Pristine–83.7277.531.19
    1 vol% Fe:TiO2186.7162.533.11
    2 vol% Fe:TiO2288.685233.66
    4 vol% Fe:TiO2480.4782.545.34
    Table 4. Sensitivity, response, recovery time and % of hysteresis loss for pristine and Fe-doped TiO2 thin films.
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    Dipak L Gapale, Pranav P. Bardapurkar, Sandeep A. Arote, Sanjaykumar Dalvi, Prashant Baviskar, Ratan Y Borse. Humidity sensing properties of spray deposited Fe doped TiO2 thin film[J]. Journal of Semiconductors, 2021, 42(12): 122805
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