• Chinese Optics Letters
  • Vol. 20, Issue 12, 121301 (2022)
Ze Chen1、2, Haibin Lü3, Yanfeng Chen1、2、*, and Xiaoping Liu3、**
Author Affiliations
  • 1National Laboratory of Solid State Microstructures and College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China
  • 2Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
  • 3School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
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    DOI: 10.3788/COL202220.121301 Cite this Article Set citation alerts
    Ze Chen, Haibin Lü, Yanfeng Chen, Xiaoping Liu. High-performance millimeter-scale silicon grating emitters for beam steering applications[J]. Chinese Optics Letters, 2022, 20(12): 121301 Copy Citation Text show less

    Abstract

    A 2-mm-long silicon-on-insulator grating emitter with a narrow angular full width at half-maximum (FWHM) and a high sideband suppression ratio (SSR) is proposed and designed. It consists of a Si3N4/Si grating with an approximate Gaussian emission profile along the grating length, which aims to reduce the sidelobe intensity of the scanning light in the far-field, thereby improving the resolution of the longitudinal steering resolution of the light detection and ranging (lidar). Numerical analysis shows that the angular FWHM of the emitted beam could be as low as 0.026° for a grating length of 2.247 mm and the input TE-like waveguide mode at 1550 nm, and the SSR could be more than 32.622 dB. Moreover, this Si3N4/Si grating exhibits a favorable fabrication error tolerance when considering the width and length variation of the Si3N4 overlayer in practice. Our design offers a promising platform for realizing integrated optical phased arrays for the long-distance solid-state lidar.
    {g1(S)=j=040aj[(S50)/a41]j+a42e(Sa43)2/a44g2(S)=j=040bi[(S50)/b41]j+b42e(Sb43)2/b44,

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    W(z)={g1(S)·WSi,Λ(n1)<zΛ(n1)+Λg2(S),0,others,

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    κμν(z)=jωε04Pξ0W(z)dx0h0dy(n2n02)Eμt*·Eνt,

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    dAm(z)dzνaν(z,βν)κmν(z)exp(jδz)dβν,(4a)

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    daν(z,βν)dz=mκνm(z)Am(z)exp(jδz),(4b)

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    aν(z,βν)=0zmκνm(z)Am(z)exp(jδz)dz.

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    dAm(z)dz=πν|κmν(z)|2Am(z).

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    dPm(z)dz=2πν|κmν(z)|2|Am(z)|2,

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    C=0LF1·F2dz0L|F1|2dz·0L|F2|2dz=0.9992,

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    Ze Chen, Haibin Lü, Yanfeng Chen, Xiaoping Liu. High-performance millimeter-scale silicon grating emitters for beam steering applications[J]. Chinese Optics Letters, 2022, 20(12): 121301
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