High-performance millimeter-scale silicon grating emitters for beam steering applications

Ze Chen; Haibin Lü; Yanfeng Chen; Xiaoping Liu

doi:10.3788/COL202220.121301

Journals >Chinese Optics Letters >Volume 20 >Issue 12 >Page 121301 > Article

Chinese Optics Letters
Vol. 20, Issue 12, 121301 (2022)

High-performance millimeter-scale silicon grating emitters for beam steering applications

Ze Chen^1、2, Haibin Lü³, Yanfeng Chen^1、2、*, and Xiaoping Liu^3、**

Author Affiliations

¹National Laboratory of Solid State Microstructures and College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China

²Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China

³School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China

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DOI: 10.3788/COL202220.121301 Cite this Article Set citation alerts

Ze Chen, Haibin Lü, Yanfeng Chen, Xiaoping Liu. High-performance millimeter-scale silicon grating emitters for beam steering applications[J]. Chinese Optics Letters, 2022, 20(12): 121301 Copy Citation Text

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Ze Chen, Haibin Lü, Yanfeng Chen, Xiaoping Liu. High-performance millimeter-scale silicon grating emitters for beam steering applications[J]. Chinese Optics Letters, 2022, 20(12): 121301

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