• Laser & Optoelectronics Progress
  • Vol. 61, Issue 19, 1913009 (2024)
Bigeng Chen1,*, Ke Li2, Yiru Zhao3, and Shaoliang Yu1
Author Affiliations
  • 1Zhejiang Laboratory, Hangzhou 311121, Zhejiang , China
  • 2Pengcheng Laboratory, Shenzhen 518000, Guangdong , China
  • 3School of Electronic Engineering, Chaohu University, Hefei 238024, Anhui , China
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    DOI: 10.3788/LOP241594 Cite this Article Set citation alerts
    Bigeng Chen, Ke Li, Yiru Zhao, Shaoliang Yu. Research Progress on Silicon Electro-Optical Modulator (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(19): 1913009 Copy Citation Text show less

    Abstract

    As one of the core devices in optical systems for interconnect, communication, and sensing, electro-optical modulators are in charge of the critical functionality of electric-optical signal conversion. Silicon electro-optical modulators based on silicon on insulator (SOI) exhibit various advantages such as compact size, high modulation efficiency, and CMOS fabrication compatibility. Therefore, they have been a hot topic for years and are being commercially deployed on a large scale. Furthermore, the popularization of artificial intelligence and rise of hyper data centers continuously drive the development and innovation of electro-optical modulators. This review first introduces the two principles of silicon electro-optical modulation—free carrier plasma dispersion effect and DC Kerr effect—followed by the common modulation mechanisms and classical forms of devices. Subsequently, we present recent typical innovative advances in high-speed optical interconnects, microwave photonics, and optical sensing. Finally, we summarize the development status and opportunities of silicon electro-optical modulators and discuss the existing challenges, emphasizing the importance of the original innovations of the modulation principle.
    Δn=-(e2λ2/8π2c2ε0n)(ΔNe/mce*+ΔNh/mch*)
    Δα=(e3λ2/4π2c3ε0n)[ΔNe/(mce*)2μe+ΔNh/(mch*)2μh]
    Δn(t)=3χ(3)2nSiFDC2+12FRF2+2FDCFRFcosΩt+12FRF2cos2Ωt
    τ=(Qλ)/(2πc)
    Bigeng Chen, Ke Li, Yiru Zhao, Shaoliang Yu. Research Progress on Silicon Electro-Optical Modulator (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(19): 1913009
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