• Chinese Optics Letters
  • Vol. 14, Issue 5, 052201 (2016)
An Pan1, Tao Chen1,*, Cunxia Li2, and Xun Hou1
Author Affiliations
  • 1Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
  • 2Xi’an University of Technology, Department of Applied Physics, Xi’an 710049, China
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    DOI: 10.3788/COL201614.052201 Cite this Article Set citation alerts
    An Pan, Tao Chen, Cunxia Li, Xun Hou, "Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching," Chin. Opt. Lett. 14, 052201 (2016) Copy Citation Text show less
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    An Pan, Tao Chen, Cunxia Li, Xun Hou, "Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching," Chin. Opt. Lett. 14, 052201 (2016)
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