Researching | Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

Journals >Chinese Optics Letters >Volume 14 >Issue 5 >Page 052201 > Article

Chinese Optics Letters
Vol. 14, Issue 5, 052201 (2016)

Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

An Pan¹, Tao Chen^1、*, Cunxia Li², and Xun Hou¹

Author Affiliations

¹Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

²Xi’an University of Technology, Department of Applied Physics, Xi’an 710049, China

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DOI: 10.3788/COL201614.052201 Cite this Article Set citation alerts

An Pan, Tao Chen, Cunxia Li, Xun Hou. Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching[J]. Chinese Optics Letters, 2016, 14(5): 052201 Copy Citation Text

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An Pan, Tao Chen, Cunxia Li, Xun Hou. Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching[J]. Chinese Optics Letters, 2016, 14(5): 052201

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