Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

An Pan; Tao Chen; Cunxia Li; Xun Hou

doi:10.3788/COL201614.052201

Journals >Chinese Optics Letters >Volume 14 >Issue 5 >Page 052201 > Article

Chinese Optics Letters
Vol. 14, Issue 5, 052201 (2016)

Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

An Pan¹, Tao Chen^1,*, Cunxia Li², and Xun Hou¹

Author Affiliations

¹Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

²Xi’an University of Technology, Department of Applied Physics, Xi’an 710049, China

show less

DOI: 10.3788/COL201614.052201 Cite this Article Set citation alerts

An Pan, Tao Chen, Cunxia Li, Xun Hou, "Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching," Chin. Opt. Lett. 14, 052201 (2016) Copy Citation Text

EndNote(RIS)

BibTex

Plain Text

show less

Cited By

Article index updated: May. 31, 2025

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 16 article(s) from Web of Science.

The article is cited by 4 article(s) CLP online library. (Some content might be in Chinese.)

An Pan, Tao Chen, Cunxia Li, Xun Hou, "Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching," Chin. Opt. Lett. 14, 052201 (2016)

Download Citation

EndNote(RIS)

BibTex

Plain Text

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information

微信扫一扫：分享

微信扫一扫：分享