Particulate Control Technology Based on Pulsed Laser Deposition

Dai Shoujun; Yu Jin; Mo Zeqiang; Wang Jinduo; He Jianguo; Wang Xiaodong; Meng Jingjing; Wang Baopeng

doi:10.3788/LOP202158.0100004

[1] Dijkkamp D, Venkatesan T, Wu X D et al. Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high Tc bulk material[J]. Applied Physics Letters, 51, 619-621(1987). http://scitation.aip.org/content/aip/journal/apl/51/8/10.1063/1.98366

[2] Gamaly E G, Rode A V, Luther-Davies B. Ultrafast ablation with high-pulse-rate lasers. Part I: theoretical considerations[J]. Journal of Applied Physics, 85, 4213-4221(1999). http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5023149

[3] Eason R W. May-Smith T C, Sloyan K A, et al. Multi-beam pulsed laser deposition for advanced thin-film optical waveguides[J]. Journal of Physics D: Applied Physics, 47, 034007(2014).

[4] Cheng Y, Lu Y M, Guo Y L et al. Development of function films prepared by pulsed laser deposition technology[J]. Laser & Optoelectronics Progress, 52, 120003(2015).

[5] Gontad F, Cesaria M, Klini A et al. Droplet distribution during sub-picosecond laser deposition of gold nanoparticles[J]. Applied Surface Science, 419, 603-613(2017). http://www.sciencedirect.com/science/article/pii/S0169433217314198

[6] Cheng Y, Lu Y M, Huang G J et al. Pre-research on the diamond-like carbon film prepared by magnet-assistant pulsed laser deposition[J]. Infrared and Laser Engineering, 48, 1117002(2019).

[7] van de Riet E, Dieleman J. Reduction of droplet emission and target roughening in laser ablation and deposition of metals[J]. Journal of Applied Physics, 74, 2008-2012(1993). http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5146742

[8] Luther-Davies B, Kolev V Z, Lederer M J et al. Table-top 50-W laser system for ultra-fast laser ablation[J]. Applied Physics A, 79, 1051-1055(2004).

[9] Peng M D, Lu W E, Xia Y et al. Study on preparation and properties of superconducting niobium films by pulsed laser deposition[J]. Materials Reports, 32, 105-109(2018).

[10] Mo G K, Liu J H, Zou Z L et al. Preparation of low-resistivity GZO thin films using pulsed laser deposition and investigation of optoelectronic properties[J]. Chinese Journal of Lasers, 46, 1003001(2019).

[11] Liang L R, Wei A X, Mo Z. Bi3.95Er0.05Ti3O12 thin films synthesized by pulsed laser deposition technique and their dielectric properties at room temperature[J]. Chinese Journal of Lasers, 45, 0902002(2018).

[12] Greer J A. History and current status of commercial pulsed laser deposition equipment[J]. Journal of Physics D: Applied Physics, 47, 034005(2014). http://adsabs.harvard.edu/abs/2014JPhD...47c4005G

[13] Greer J A, Tabat M D. Large-area pulsed laser deposition: techniques and applications[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 13, 1175-1181(1995).

[14] Rode A V, Luther-Davies B, Gamaly E G. Ultrafast ablation with high-pulse-rate lasers. Part II: experiments on laser deposition of amorphous carbon films[J]. Journal of Applied Physics, 85, 4222-4230(1999). http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5023150

[15] Fähler S, Störmer M, Krebs H U. Origin[J]. avoidance of droplets during laser ablation of metals. Applied Surface Science, 109/110, 433-436(1997).

[16] Weaver I. Lewis C L S. Polar distribution of ablated atomic material during the pulsed laser deposition of Cu in vacuum: dependence on focused laser spot size and power density[J]. Journal of Applied Physics, 79, 7216-7222(1996).

[17] Schenck PK, Vaudin MD, Bonnell DW, et al., 1998, 127/128/129: 655- 661.

[18] BraunS, DietschR, HaidlM, et al. ( PLD) [J]. MicroelectronicEngineering, 2001, 57/58: 9- 15.

[19] Sakai S, Takahashi M, Motohashi K et al. Large-area pulsed-laser deposition of dielectric and ferroelectric thin films[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 25, 903-907(2007).

[20] Doughty C, Findikoglu A T, Venkatesan T. Steady state pulsed laser deposition target scanning for improved plume stability and reduced particle density[J]. Applied Physics Letters, 66, 1276-1278(1995). http://scitation.aip.org/content/aip/journal/apl/66/10/10.1063/1.113261

[21] Wagner FX, ScaggsM, KochA, et al., 1998, 127/128/129: 477- 480.

[22] Rong F X. Liquid target pulsed laser deposition[J]. Applied Physics Letters, 67, 1022-1024(1995).

[23] Szörényi T, Kántor Z, Tóth Z et al[J]. molten metals. Applied Surface Science, 138/139, 275-279(1999).

[24] Kántor Z, Geretovszky Z, Szörényi T. Pulsed laser deposition of metals at target temperatures close to the melting point[J]. Applied Physics A, 69, S617-S619(1999). http://link.springer.com/article/10.1007/s003390051489

[25] Ristoscu C, Ghica C, Papadopoulou E L et al. Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition[J]. Thin Solid Films, 519, 6381-6387(2011). http://www.sciencedirect.com/science/article/pii/S0040609011008819

[26] Marcu A. Grigoriu1 C, Jiang W H,et al. Pulsed laser deposition of YBCO thin films in a shadow mask configuration[J]. Thin Solid Films, 360, 166-172(2000).

[27] Popescu A C, Duta L, Dorcioman G et al. Radical modification of the wetting behavior of textiles coated with ZnO thin films and nanoparticles when changing the ambient pressure in the pulsed laser deposition process[J]. Journal of Applied Physics, 110, 064321(2011).

[28] Dai S J, Yu J, Mo Z Q et al. Uniform and smooth molybdenum film produced through picosecond pulsed laser deposition[J]. Journal of Vacuum Science & Technology A, 37, 061506(2019).

[29] Siew W O, Yapl S S, Yong T K et al. Effects of phase explosion in pulsed laser deposition of nickel thin film and sub-micron droplets[J]. Applied Surface Science, 257, 2775-2778(2011). http://www.sciencedirect.com/science/article/pii/S0169433210014273

[30] Cherief N, Givord D, Liénard A et al. Laser ablation deposition and magnetic characterization of metallic thin films based on rare earth and transition metals[J]. Journal of Magnetism and Magnetic Materials, 121, 94-101(1993).

[31] Witanachchi S, Ahmed K, Sakthivel P et al. Dual-laser ablation for particulate-free film growth[J]. Applied Physics Letters, 66, 1469-1471(1995). http://scitation.aip.org/content/aip/journal/apl/66/12/10.1063/1.113657

[32] Mukherjee P, Chen S D, Cuff J B et al. Evidence for the physical basis and universality of the elimination of particulates using dual-laser ablation. II. Dynamic time-resolved target reflectivity of metals and film growth of Zn[J]. Journal of Applied Physics, 91, 1837-1844(2002). http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5031779

[33] Mukherjee D, Hyde R, Mukherjee P et al. Advantages of dual-laser ablation in the growth of multicomponent thin films[J]. AIP Conference Proceedings, 1464, 325-335(2012).

[34] Prentice J J. Grant-Jacob J A, Kurilchik S V, et al. Particulate reduction in PLD-grown crystalline films via bi-directional target irradiation[J]. Applied Physics A, 125, 1-8(2019).

[35] Amoruso S, Ausanio G, Bruzzese R et al. Characterization of laser ablation of solid targets with near-infrared laser pulses of 100 fs and 1 ps duration[J]. Applied Surface Science, 252, 4863-4870(2006). http://www.sciencedirect.com/science/article/pii/S0169433205013760

[36] Ristoscu C, Socol G, Ghica C et al. Femtosecond pulse shaping for phase and morphology control in PLD: Synthesis of cubic SiC[J]. Applied Surface Science, 252, 4857-4862(2006). http://www.sciencedirect.com/science/article/pii/S016943320501370X

[37] Amoruso S, Ausanio G, Barone A C et al. Nanoparticles size modifications during femtosecond laser ablation of nickel in vacuum[J]. Applied Surface Science, 254, 1012-1016(2007).

[38] Liu J R, Bai T, Yao D S et al. Study on pulsed excimer laser deposited films[J]. High Power Laser & Particle Beams, 14, 646-650(2002).

[39] Gamaly E G, Rode A, Uteza O et al. Control over a phase state of the laser plume ablated by femtosecond laser: spatial pulse shaping[J]. Journal of Applied Physics, 95, 2250-2257(2004). http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5038723

[40] Salminen T, Hahtala M, Seppälä I et al. Pulsed laser deposition of yttria-stabilized zirconium dioxide with a high repetition rate picosecond fiber laser[J]. Applied Physics A, 98, 487-490(2010). http://link.springer.com/article/10.1007/s00339-009-5482-x

[41] Salminen T, Hahtala M, Seppälä I et al. Picosecond pulse laser ablation of yttria-stabilized zirconia from kilohertz to megahertz repetition rates[J]. Applied Physics A, 101, 735-738(2010). http://link.springer.com/article/10.1007/s00339-010-5931-6

[42] Pervolaraki M, Mihailescu C N, Luculescu C R et al. Picosecond ultrafast pulsed laser deposition of SrTiO3[J]. Applied Surface Science, 336, 278-282(2015). http://smartsearch.nstl.gov.cn/paper_detail.html?id=99aa3d344766da31f4de12783bb0eba1

[43] Teghil R. Santagata A, de Bonis A, et al. Applications of ultra-short pulsed laser ablation: thin films deposition and fs/ns dual-pulse laser-induced breakdown spectroscopy[J]. Physica Scripta, 78, 058113(2008).

[44] György E, Mihailescu I N, Kompitsas M et al. Deposition of particulate-free thin films by two synchronised laser sources: effects of ambient gas pressure and laser fluence[J]. Thin Solid Films, 446, 178-183(2004). http://www.sciencedirect.com/science/article/pii/S0040609003013798

[45] Krstulović N, Salamon K, Modic M et al. Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 107, 67-74(2015).

[46] Krstulović N, Čutić N, Milošević S. Cavity ringdown spectroscopy of collinear dual-pulse laser plasmas in vacuum[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 64, 271-277(2009).

[47] Murakami M, Liu B, Hu Z D et al. Burst-mode femtosecond pulsed laser deposition for control of thin film morphology and material ablation[J]. Applied Physics Express, 2, 042501(2009).

[48] Thelander E, Rauschenbach B. Influence of burst pulses on the film topography in picosecond pulsed laser deposition of LaAlO3[J]. Journal of Physics: Conference Series, 356, 012015(2012). http://dx.doi.org/10.1088/1742-6596/356/1/012015

[49] Dai S J, Yu J, Mo Z Q et al. Influence of double pulse ablation on the film topography in picosecond pulsed laser deposition of nickel[J]. Applied Physics Express, 13, 035505(2020). http://iopscience.iop.org/article/10.35848/1882-0786/ab769e

[50] Broekmaat J J, Dekkers J M, Janssens J A, filter: EP20100170223[P] et al. -07-21(2010).

[51] Gorbunov AA, PompeW, SewingA, et al., 1996, 96/97/98: 649- 655.

[52] Tselev A, Gorbunov A, Pompe W. Cross-beam pulsed laser deposition: General characteristic[J]. Review of Scientific Instruments, 72, 2665-2672(2001).

[53] Inoue N, Ozaki T, Monnaka T et al. A new pulsed laser deposition method using an aperture plate[J]. Japanese Journal of Applied Physics, 36, 704-709(1997). http://adsabs.harvard.edu/abs/1997JaJAP..36..704I

[54] Jordan R, Cole D[J]. Lunney J G. Pulsed laser deposition of particulate-free thin films using a curved magnetic filter. Applied Surface Science, 109/110, 403-407(1997).

[55] Tsui Y Y, Minami H, Vick D et al. Debris reduction for copper and diamond-like carbon thin films produced by magnetically guided pulsed laser deposition[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 20, 744-747(2002).

[56] Cheng Y[M]. Technology of diamond-like carbon films prepared by pulsed laser deposition, 302-305(2017).

[57] Stafe M, Marcu A, Puscas N. Pulsed Laser Ablation of Solids Basics, Theory and Applications[M]. Heidelberg: Springer, 175-181(2014).

[58] Marcu A, Grigoriu C, Jiang W et al. Deposition parameters influences in pulsed laser deposition by plume reflection[J]. Proceedings of SPIE, 5227, 312-317(2003).

[59] Liimatainen J, Kekkonen V, Piirto J et al. Ultra short pulsed laser deposition technology for industrial applications[J]. Journal of Materials Science and Engineering B, 5, 196-205(2015).

[60] Kekkonen V, Chaudhuri S, Clarke F et al. Picosecond pulsed laser deposition of metal-oxide sensing layers with controllable porosity for gas sensor applications[J]. Applied Physics A, 122, 1-7(2016). http://link.springer.com/article/10.1007/s00339-016-9760-0

[61] Huotari J, Kekkonen V, Puustinen J et al. Pulsed laser deposition for improved metal-oxide gas sensing layers[J]. Procedia Engineering, 168, 1066-1069(2016).