• Laser & Optoelectronics Progress
  • Vol. 58, Issue 1, 100004 (2021)
Dai Shoujun1、2, Yu Jin1、2、*, Mo Zeqiang1、2, Wang Jinduo1、2, He Jianguo1、2, Wang Xiaodong1、2, Meng Jingjing1、2, and Wang Baopeng1、2
Author Affiliations
  • 1Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2University of Chinese Academy of Sciences, Beijing 100049,China
  • show less
    DOI: 10.3788/LOP202158.0100004 Cite this Article Set citation alerts
    Dai Shoujun, Yu Jin, Mo Zeqiang, Wang Jinduo, He Jianguo, Wang Xiaodong, Meng Jingjing, Wang Baopeng. Particulate Control Technology Based on Pulsed Laser Deposition[J]. Laser & Optoelectronics Progress, 2021, 58(1): 100004 Copy Citation Text show less
    Experimental set-up of the dual-laser deposition[31]
    Fig. 1. Experimental set-up of the dual-laser deposition[31]
    Experimental set-up of the liquid-target PLD[22]
    Fig. 2. Experimental set-up of the liquid-target PLD[22]
    Schematic diagram of ordinary circular scanning and oscillating scanning and their ablation trajectory diagram[20]. (a) Oscillating scanning; (b) scattered ablation trajectory; (c) ordinary circular scanning(the target rotates about its center); (d) annular ablation trajectory
    Fig. 3. Schematic diagram of ordinary circular scanning and oscillating scanning and their ablation trajectory diagram[20]. (a) Oscillating scanning; (b) scattered ablation trajectory; (c) ordinary circular scanning(the target rotates about its center); (d) annular ablation trajectory
    Experimental set-up of the cross dual-laser deposition[44]
    Fig. 4. Experimental set-up of the cross dual-laser deposition[44]
    Experimental set-up of the collinear dual-laser deposition[45]
    Fig. 5. Experimental set-up of the collinear dual-laser deposition[45]
    Schematic illustration of the pulse picking mechanism[47]
    Fig. 6. Schematic illustration of the pulse picking mechanism[47]
    Schematic diagram of the picosecond pulse laser and three output pulse shapes[49]. (a) Schematic diagram of the picosecond pulse laser; (b)?(d) output pulse shapes at different voltage durations
    Fig. 7. Schematic diagram of the picosecond pulse laser and three output pulse shapes[49]. (a) Schematic diagram of the picosecond pulse laser; (b)?(d) output pulse shapes at different voltage durations
    Schematic diagram of the experimental set-up for PLD, in which the velocity selector filter is inserted between the target and the substrate[30]. (a) Deposition process when the filter is in the initial state; (b) deposition process when the filter is in working state
    Fig. 8. Schematic diagram of the experimental set-up for PLD, in which the velocity selector filter is inserted between the target and the substrate[30]. (a) Deposition process when the filter is in the initial state; (b) deposition process when the filter is in working state
    Experimental set-up of symmetric dual target PLD[52]
    Fig. 9. Experimental set-up of symmetric dual target PLD[52]
    Experimental set-up of the off-axis laser deposition[53]
    Fig. 10. Experimental set-up of the off-axis laser deposition[53]
    Schematic of the PLD with magnetic duct[54]
    Fig. 11. Schematic of the PLD with magnetic duct[54]
    Mask PLD experimental setup[57]
    Fig. 12. Mask PLD experimental setup[57]
    Experimental setup for a PLD system using plasma reflection technique[57]
    Fig. 13. Experimental setup for a PLD system using plasma reflection technique[57]
    Dai Shoujun, Yu Jin, Mo Zeqiang, Wang Jinduo, He Jianguo, Wang Xiaodong, Meng Jingjing, Wang Baopeng. Particulate Control Technology Based on Pulsed Laser Deposition[J]. Laser & Optoelectronics Progress, 2021, 58(1): 100004
    Download Citation