Han Ye, Qin Han, Shuai Wang, Feng Xiao, Fan Xiao, Yimiao Chu, Liyan Geng. Fabrication and photo-response of monolithic 90° hybrid-photodetector array chip for QPSK detection[J]. Chinese Optics Letters, 2023, 21(1): 011301
- Chinese Optics Letters
- Vol. 21, Issue 1, 011301 (2023)
Fig. 1. Cross-section SEM image of epitaxial layers after regrowth.
Fig. 2. PD jointed to the hybrid waveguide 3D image.
Fig. 3. Microscope photo of the fabricated monolithic chip.
Fig. 4. Dark current of the PD array.
Fig. 5. Responsivities and excess loss of the monolithic chip.
Fig. 6. CMRR of the monolithic chip.
Fig. 7. Spectral response of the monolithic chip integrated with the splitter.
Fig. 8. Phase deviation of the monolithic chip.
Fig. 9. Simulated phase deviation with fabrication error.
Fig. 10. Simulated excess loss with fabrication error.
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Table 1. Parameters of the 90° Hybrid
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Table 2. Parameters of the Evanescent Photodetector
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Table 3. Parameters of the 1 × 2 Splitter
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