• Chinese Optics Letters
  • Vol. 21, Issue 1, 011301 (2023)
Han Ye1、2、*, Qin Han1、2、3, Shuai Wang1, Feng Xiao1、4, Fan Xiao1、4, Yimiao Chu1、4, and Liyan Geng1
Author Affiliations
  • 1State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 4College of Materials Science and Optoelectronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/COL202321.011301 Cite this Article Set citation alerts
    Han Ye, Qin Han, Shuai Wang, Feng Xiao, Fan Xiao, Yimiao Chu, Liyan Geng. Fabrication and photo-response of monolithic 90° hybrid-photodetector array chip for QPSK detection[J]. Chinese Optics Letters, 2023, 21(1): 011301 Copy Citation Text show less

    Abstract

    A quadrature phase-shift keying (QPSK) coherent photodetector chip consisting of a 4×4 multimode interference 90° optical hybrid and a four-channel evanescent photodetector array is designed and fabricated with its photo-response in the L-band characterized. The metal organic chemical vapor deposition regrowth method is adopted to realize active–passive monolithic integration. The chip exhibits a low dark current below 100 nA for each photodetector in the array, a low excess loss of 0.85 dB, a common mode ratio rejection better than 13.6 dB, and a phase deviation within ±10° over the 40 nm wavelength span.
    LMMI=neffWeff2λ0,

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    CMRRI/Q=20log(|I1/2I4/3I1/2+I4/3|),

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    FSRλ02neffΔL,

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    ΔΦij=fp/vifp/vjFSR·(2π),i=1,2,3,4;j=1,2,3,4;ij,

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    Han Ye, Qin Han, Shuai Wang, Feng Xiao, Fan Xiao, Yimiao Chu, Liyan Geng. Fabrication and photo-response of monolithic 90° hybrid-photodetector array chip for QPSK detection[J]. Chinese Optics Letters, 2023, 21(1): 011301
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