• Photonics Research
  • Vol. 6, Issue 8, 768 (2018)
Xuequan Chen1, Edward P. J. Parrott1, Zhe Huang2, Hau-Ping Chan3, and Emma Pickwell-MacPherson1,4,*
Author Affiliations
  • 1Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, China
  • 2School of Science, Zhejiang University of Science and Technology, Hangzhou 310023, China
  • 3Department of Electronic Engineering, City University of Hong Kong, Kowloon, N.T., Hong Kong, China
  • 4Department of Physics and Astronomy, Warwick University, Coventry, UK
  • show less
    DOI: 10.1364/PRJ.6.000768 Cite this Article Set citation alerts
    Xuequan Chen, Edward P. J. Parrott, Zhe Huang, Hau-Ping Chan, Emma Pickwell-MacPherson, "Robust and accurate terahertz time-domain spectroscopic ellipsometry," Photonics Res. 6, 768 (2018) Copy Citation Text show less
    References

    [1] M. Naftaly, R. E. Miles. Terahertz time-domain spectroscopy for material characterization. Proc. IEEE, 95, 1658-1665(2007).

    [2] D. Grischkowsky, S. Keiding, M. van Exter, C. Fattinger. Far-infrared time-domain spectroscopy with terahertz beams of dielectrics and semiconductors. J. Opt. Soc. Am. B, 7, 2006-2015(1990).

    [3] Y. Jin, G. Kim, S. Jeon. Terahertz dielectric properties of polymers. J. Korean Phys. Soc., 49, 513-517(2006).

    [4] P. D. Cunningham, N. N. Valdes, F. A. Vallejo, L. M. Hayden, B. Polishak, X. H. Zhou, J. Luo, A. K. Y. Jen, J. C. Williams, R. J. Twieg. Broadband terahertz characterization of the refractive index and absorption of some important polymeric and organic electro-optic materials. J. Appl. Phys., 109, 043505(2011).

    [5] L. Thrane, R. H. Jacobsen, P. U. Jepsen, S. R. Keiding. Chemical THz reflection spectroscopy of liquid water. Chem. Phys. Lett., 240, 330-333(1995).

    [6] J. T. Kindt, C. A. Schmuttenmaer. Far-infrared dielectric properties of polar liquids probed by femtosecond terahertz pulse spectroscopy. J. Phys. Chem., 100, 10373-10379(1996).

    [7] E. Pickwell, A. J. Fitzgerald, B. E. Cole, P. F. Taday, R. J. Pye, T. Ha, M. Pepper, V. P. Wallace. Simulating the response of terahertz radiation to basal cell carcinoma using ex vivo spectroscopy measurements. J. Biomed. Opt., 10, 064021(2005).

    [8] S. Fan, B. S. Y. Ung, E. P. J. Parrott, V. P. Wallace, E. Pickwell-Macpherson. In vivo terahertz reflection imaging of human scars during and after the healing process. J. Biophoton., 10, 1143-1151(2016).

    [9] Y. He, B. S.-Y. Ung, E. P. J. Parrott, A. T. Ahuja, E. Pickwell-MacPherson. Freeze-thaw hysteresis effects in terahertz imaging of biomedical tissues. Biomed. Opt. Express, 7, 4711-4717(2016).

    [10] P. U. Jepsen, B. M. Fischer, A. Thoman, H. Helm, J. Y. Suh, R. Lopez, R. F. Haglund. Metal-insulator phase transition in a VO2 thin film observed with terahertz spectroscopy. Phys. Rev. B, 74, 205103(2006).

    [11] P. A. George, J. Strait, J. Dawlaty, S. Shivaraman, M. Chandrashekhar, F. Rana, M. G. Spencer. Ultrafast optical-pump terahertz-probe spectroscopy of the carrier relaxation and recombination dynamics in epitaxial graphene. Nano Lett., 8, 4248-4251(2008).

    [12] A. Pashkin, M. Kempa, H. Němec, F. Kadlec, P. Kužel. Phase-sensitive time-domain terahertz reflection spectroscopy. Rev. Sci. Instrum., 74, 4711-4717(2003).

    [13] S. Nashima, O. Morikawa, K. Takata, M. Hangyo. Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy. Appl. Phys. Lett., 79, 3923-3925(2001).

    [14] E. M. Vartiainen, Y. Ino, R. Shimano, M. Kuwata-Gonokami, Y. P. Svirko, K. E. Peiponen. Numerical phase correction method for terahertz time-domain reflection spectroscopy. J. Appl. Phys., 96, 4171-4175(2004).

    [15] V. Lucarini, Y. Ino, K. E. Peiponen, M. Kuwata-Gonokami. Detection and correction of the misplacement error in terahertz spectroscopy by application of singly subtractive Kramers-Kronig relations. Phys. Rev. B, 72, 3-8(2005).

    [16] X. Chen, E. P. J. Parrott, B. S.-Y. Ung, E. Pickwell-MacPherson. A robust baseline and reference modification and acquisition algorithm for accurate THz imaging. IEEE Trans. Terahertz Sci. Technol., 7, 493-501(2017).

    [17] S. Fan, E. P. J. Parrott, B. S. Y. Ung, E. Pickwell-MacPherson. Calibration method to improve the accuracy of THz imaging and spectroscopy in reflection geometry. Photon. Res., 4, A29-A35(2016).

    [18] H. Hirori, K. Yamashita, M. Nagai, K. Tanaka. Attenuated total reflection spectroscopy in time domain using terahertz coherent pulses. Jpn. J. Appl. Phys., 43, L1287-L1289(2004).

    [19] Y. Ogawa, L. Cheng, S. Hayashi, K. Fukunaga. Attenuated total reflection spectra of aqueous glycine in the terahertz region. IEICE Electron. Express, 6, 117-121(2009).

    [20] S. Y. Huang, Y. X. J. Wang, D. K. W. Yeung, A. T. Ahuja, Y.-T. Zhang, E. Pickwell-MacPherson. Tissue characterization using terahertz pulsed imaging in reflection geometry. Phys. Med. Biol., 54, 149-160(2009).

    [21] S. Huang, P. C. Ashworth, K. W. C. Kan, Y. Chen, V. P. Wallace, Y. Zhang, E. Pickwell-MacPherson. Improved sample characterization in terahertz reflection imaging and spectroscopy. Opt. Express, 17, 3848-3854(2009).

    [22] H. Fujiwara. Spectroscopic Ellipsometry Principles and Applications(2007).

    [23] T. Hofmann, C. M. Herzinger, A. Boosalis, T. E. Tiwald, J. A. Woollam, M. Schubert. Variable-wavelength frequency-domain terahertz ellipsometry. Rev. Sci. Instrum., 81, 023101(2010).

    [24] T. Nagashima, M. Hangyo. Measurement of complex optical constants of a highly doped Si wafer using terahertz ellipsometry. Appl. Phys. Lett., 79, 3917-3919(2001).

    [25] M. Yamashita, H. Takahashi, T. Ouchi, C. Otani. Ultra-broadband terahertz time-domain ellipsometric spectroscopy utilizing GaP and GaSe emitters and an epitaxial layer transferred photoconductive detector. Appl. Phys. Lett., 104, 051103(2014).

    [26] N. Matsumoto, T. Hosokura, T. Nagashima, M. Hangyo. Measurement of the dielectric constant of thin films by terahertz time-domain spectroscopic ellipsometry. Opt. Lett., 36, 265-267(2011).

    [27] M. Neshat, N. Armitage. Terahertz time-domain spectroscopic ellipsometry: instrumentation and calibration. Opt. Express, 20, 29063-29075(2012).

    [28] X. Chen, E. P. J. Parrott, P. Tekavec, E. Pickwell-MacPherson. A novel method for accurate THz ellipsometry. 42nd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 1-2(2017).

    [29] A. Soltani, D. Jahn, L. Duschek, E. Castro-Camus, M. Koch, W. Withayachumnankul. Attenuated total reflection terahertz time-domain spectroscopy: uncertainty analysis and reduction scheme. IEEE Trans. Terahertz Sci. Technol., 6, 32-39(2016).

    [30] I. Pupeza, R. Wilk, M. Koch. Highly accurate optical material parameter determination with THz time-domain spectroscopy. Opt. Express, 15, 4335-4350(2007).

    [31] T. D. Dorney, R. G. Baraniuk, D. M. Mittleman. Material parameter estimation with terahertz time-domain spectroscopy. J. Opt. Soc. Am. A, 18, 1562-1571(2001).

    [32] H. El Rhaleb, N. Cella, J. P. Roger, D. Fournier, A. C. Boccara, A. Zuber. Beam size and collimation effects in spectroscopic ellipsometry of transparent films with optical thickness inhomogeneity. Thin Solid Films, 288, 125-131(1996).

    [33] Z. Huang, E. P. J. Parrott, H. Park, H. P. Chan, E. Pickwell-MacPherson. High extinction ratio and low transmission loss thin-film terahertz polarizer with a tunable bilayer metal wire-grid structure. Opt. Lett., 39, 793-796(2014).

    [34] X. Chen. THz-ellipsometry-algorithm.

    [35] J. Dai, J. Zhang, W. Zhang, D. Grischkowsky. Terahertz time-domain spectroscopy characterization of the far-infrared absorption and index of refraction of high-resistivity, float-zone silicon. J. Opt. Soc. Am. B, 21, 1379-1386(2004).

    [36] M. Naftaly, R. E. Miles. Terahertz time-domain spectroscopy of silicate glasses and the relationship to material properties. J. Appl. Phys., 102, 043517(2007).

    [37] M. Zalkovskij, C. Zoffmann Bisgaard, A. Novitsky, R. Malureanu, D. Savastru, A. Popescu, P. Uhd Jepsen, A. V. Lavrinenko. Ultrabroadband terahertz spectroscopy of chalcogenide glasses. Appl. Phys. Lett., 100, 031901(2012).

    [38] I. Hamberg, C. G. Granqvist. Evaporated Sn-doped In2O3 films: basic optical properties and applications to energy-efficient windows. J. Appl. Phys., 60, R123-R160(1986).

    [39] C. Yang, C. Chang, P. Chen, P. Yu. Broadband terahertz conductivity and optical transmission of indium-tin-oxide (ITO) nanomaterials. Opt. Express, 21, 16670-16682(2013).

    [40] T. Wang, M. Zalkovskij, K. Iwaszczuk, A. V. Lavrinenko, G. V. Naik, J. Kim, A. Boltasseva, P. U. Jepsen. Ultrabroadband terahertz conductivity of highly doped ZnO and ITO. Opt. Mater. Express, 5, 566-575(2015).

    [41] C. Chen, Y. Lin, C. Chang, P. Yu, J. Shieh, C. Pan, S. Member. Frequency-dependent complex conductivities and dielectric responses of indium tin oxide thin films from the visible to the far-infrared. IEEE J. Quantum Electron., 46, 1746-1754(2010).

    Xuequan Chen, Edward P. J. Parrott, Zhe Huang, Hau-Ping Chan, Emma Pickwell-MacPherson, "Robust and accurate terahertz time-domain spectroscopic ellipsometry," Photonics Res. 6, 768 (2018)
    Download Citation