• Photonics Research
  • Vol. 6, Issue 8, 768 (2018)
Xuequan Chen1, Edward P. J. Parrott1, Zhe Huang2, Hau-Ping Chan3, and Emma Pickwell-MacPherson1、4、*
Author Affiliations
  • 1Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, China
  • 2School of Science, Zhejiang University of Science and Technology, Hangzhou 310023, China
  • 3Department of Electronic Engineering, City University of Hong Kong, Kowloon, N.T., Hong Kong, China
  • 4Department of Physics and Astronomy, Warwick University, Coventry, UK
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    DOI: 10.1364/PRJ.6.000768 Cite this Article Set citation alerts
    Xuequan Chen, Edward P. J. Parrott, Zhe Huang, Hau-Ping Chan, Emma Pickwell-MacPherson. Robust and accurate terahertz time-domain spectroscopic ellipsometry[J]. Photonics Research, 2018, 6(8): 768 Copy Citation Text show less

    Abstract

    In this work, we show how fiber-based terahertz systems can be robustly configured for accurate terahertz ellipsometry. To this end, we explain how our algorithms can be successfully applied to achieve accurate spectroscopic ellipsometry with a high tolerance on the imperfect polarizer extinction ratio and pulse shift errors. Highly accurate characterization of transparent, absorptive, and conductive samples comprehensively demonstrates the versatility of our algorithms. The improved accuracy we achieve is a fundamental breakthrough for reflection-based measurements and overcomes the hurdle of phase uncertainty.
    ρ=tanΨexp(iΔ)=Erp(ω)Ers(ω)=rpEip(ω)rsEis(ω)=rprs.(1)

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    RE(θ)=max(|ρerrorρcorrect||ρcorrect|),(2)

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    σ^=σriσi=iωϵ0(ϵ^rϵ),(3)

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    Xuequan Chen, Edward P. J. Parrott, Zhe Huang, Hau-Ping Chan, Emma Pickwell-MacPherson. Robust and accurate terahertz time-domain spectroscopic ellipsometry[J]. Photonics Research, 2018, 6(8): 768
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