Xuequan Chen, Edward P. J. Parrott, Zhe Huang, Hau-Ping Chan, Emma Pickwell-MacPherson, "Robust and accurate terahertz time-domain spectroscopic ellipsometry," Photonics Res. 6, 768 (2018)

Search by keywords or author
- Photonics Research
- Vol. 6, Issue 8, 768 (2018)

Fig. 1. (a) Schematic diagram; (b) picture of the designed fiber-based THz-TDS ellipsometer.

Fig. 2. RE as a function of θ when ρ theory = 0.1 and σ 1 = σ 2 = 0.5 ° .

Fig. 3. Flow chart of the algorithm steps.

Fig. 4. Characterized k ( ω ) as a function of frequency.

Fig. 5. Illustration of the E fields and the related directions considered in the algorithm.

Fig. 6. (a) Measured E rs , E rp , E β (multiplied by a factor of 10) and the calibrated E rp and E rs , with the measured and calibrated E rp zoom in the inset; (b) Diff as a function of pulse shift τ p and τ β ; (c) measured and calculated E β by the calibrated E rs and E rp .

Fig. 7. (a) tan Ψ ; (b) Δ ; (c) refractive index; (d) absorption coefficient of HR-Si calculated by the calibrated and uncalibrated ellipsometry data, compared with the transmission results.

Fig. 8. (a) Refractive index and (b) absorption coefficient of Glaverbel glass characterized by ellipsometry and transmission.

Fig. 9. Complex refractive index and complex conductivity of thin-film ITO. The circles are the experimental data, and the solid curves are the Drude-model fitting results by the data in the yellow region.

Set citation alerts for the article
Please enter your email address