Chen-Chen ZHANG, Hai-Yang MAO, Le-Le BAI, Ji-Jun XIONG, Wei-Bing WANG, Da-Peng CHEN. A response time measurement method for MEMS IR detectors [J]. Journal of Infrared and Millimeter Waves, 2020, 39(5): 619
- Journal of Infrared and Millimeter Waves
- Vol. 39, Issue 5, 619 (2020)
Fig. 1. Schematic diagram of response time calibration principle for IR detectors, (a)The curve of radiation intensity with time; (b)The curve of output signal with time.
Fig. 2. MEMS thermopile IR detector：(a) SEM image of chip; (b)Bare chip; (c)Packaged detector
Fig. 3. Schematic diagram of a response time measurement system using a chopper
Fig. 4. A response time measurement system for MEMS infrared detectors using a pulsed laser
Fig. 5. Structure diagram of a AOM
Fig. 6. Pulsed signal of laser in the measurement system with a time parameter of 800ns
Fig. 7. Response time of a MEMS thermopile IR detector measured using a chopper
Fig. 8. Response time of a MEMS thermopile IR detector measured using a laser
|
Table 1. 实验数据表
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20